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    Journals >Acta Optica Sinica >Volume 42 >Issue 11 >Page 1134010 > Article
    • Acta Optica Sinica
    • Vol. 42, Issue 11, 1134010 (2022)
    Research Progresses on Vacuum-Ultraviolet 193-nm Band Solid-State Lasers
    Zhigang Zhao1,2, Hongwen Xuan3,**, Jingchong Wang2, Zhenhua Cong1,2..., Xingyu Zhang1,2, Yohei Kobayashi4 and Zhaojun Liu1,2,*|Show fewer author(s)
    Author Affiliations
  • 1School of Information Science and Engineering, Shandong Provincial Key Laboratory of Laser Technology and Application, Shandong University, Qingdao 266237, Shandong, China
  • 2Key Laboratory of Laser & Infrared System, Ministry of Education, Shandong University,Qingdao 266237, Shandong, China;
  • 3GBA Branch of Aerospace Information Research Institute, Chinese Academy of Sciences, Guangzhou 510700, Guangdong, China
  • 4The Institute for Solid State Physics, The University of Tokyo, Chiba 277- 8581, Japan
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    DOI: 10.3788/AOS202242.1134010 Cite this Article Set citation alerts
    Zhigang Zhao, Hongwen Xuan, Jingchong Wang, Zhenhua Cong, Xingyu Zhang, Yohei Kobayashi, Zhaojun Liu. Research Progresses on Vacuum-Ultraviolet 193-nm Band Solid-State Lasers[J]. Acta Optica Sinica, 2022, 42(11): 1134010 Copy Citation Text show less
    Analysis and comparisons of characteristics of BBO, LBO, and CLBO crystals used for generating 193 nm laser by sum frequency. (a) Phase matching angle; (b) effective nonlinear coefficient; (c) acceptance angle; (d) walk-off angle
    Fig. 1. Analysis and comparisons of characteristics of BBO, LBO, and CLBO crystals used for generating 193 nm laser by sum frequency. (a) Phase matching angle; (b) effective nonlinear coefficient; (c) acceptance angle; (d) walk-off angle
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    CountryCompanyParameterReference
    XitonWavelength is 193.368 nm, power is 10 mW, pulse width is ~10 ns,and repetition frequency is 1--15 kHz[72]
    GermanyTopticaContinuous wave with wavelength of 193 nm and power of about 1 mW[73]
    A.P.EWavelength is 192--215 nm, and repetition frequency is 80 MHz[74]
    JapanNikonWavelength is 193.4 nm, power is 100 mW, pulse width is 1.5 ns,repetition frequency is 400 kHz, and mass factor M2<2.5[75]
    ActinixWavelength is 188 nm, and pulse energy is 2mJWavelength is 193 nm, power is 35 mW, and repetition frequency is 5 kHz[76]
    AmericaOpotekWavelength is 193--210 nm, pulse width is 6 ns, repetition frequency is 20 Hz,and pulse energy is 0.1--0.8 mJ[77]
    Table 4. Partial commercially available solid-state 193-nm lasers
    ItemMaterialBandgap /eVTPA coefficient β /(cm·GW-1)Reference
    266 nm248 nm213 nm193 nm
    KBBF8.4---1.3[82]
    CLBO6.90.450.53-1.0[82-84]
    CrystalBBO6.560.930.5 (o),0.34 (e)2.43-[85]
    LBO7.740.15-1.03-[86]
    MgF211.8-0.00130.0040.19[87-88]
    SubstrateCaF210-0.00830.30.4[87-88]
    Fused silica7.80.0170.0450.50.3[87-88]
    Table 5. TPA coefficient β at different ultraviolet wavelengths
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    Zhigang Zhao, Hongwen Xuan, Jingchong Wang, Zhenhua Cong, Xingyu Zhang, Yohei Kobayashi, Zhaojun Liu. Research Progresses on Vacuum-Ultraviolet 193-nm Band Solid-State Lasers[J]. Acta Optica Sinica, 2022, 42(11): 1134010
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