The development status of vacuum-ultraviolet (VUV) solid-state 193-nm laser sources is reviewed in this paper, including the related nonlinear crystals (e.g., BBO, LBO, CLBO, KBBF) and their characteristics, the development of 193-nm band continuous solid-state laser and pulsed solid-state laser in recent tens of years, the combinations of fundamental lasers used for generation of 193-nm solid laser, and their merits and drawbacks. The two-photon absorption phenomenon is described, which has influence on the transmission of the nonlinear crystals and the output power of ultraviolet laser. The effect of laser induced contamination in deep ultraviolet lasers is discussed, and some possible ways to avoid or alleviate this effect are also given. Finally, the difficulties and challenges of realizing high repetition rate deep ultraviolet lasers are evaluated.