Third-harmonic generation and imaging with resonant Si membrane metasurface

Ze Zheng; Lei Xu; Lujun Huang; Daria Smirnova; Khosro Zangeneh Kamali; Arman Yousefi; Fu Deng; Rocio Camacho-Morales; Cuifeng Ying; Andrey E. Miroshnichenko; Dragomir N. Neshev; Mohsen Rahmani

doi:10.29026/oea.2023.220174

[1] M Mesch, B Metzger, M Hentschel, H Giessen. Nonlinear plasmonic sensing. Nano Lett, 3155-3159(2016).

[2] A Abarca, P Gómez-Sal, A Martín, M Mena, JM Poblet et al. Ammonolysis of mono(pentamethylcyclopentadienyl) titanium(IV) derivatives. Inorg Chem, 642-651(2000).

[3] MS Verma, M Chandra. Nonlinear plasmonic sensing for label-free and selective detection of mercury at picomolar level. ACS Sens, 645-649(2020).

[4] V Kravtsov, R Ulbricht, JM Atkin, MB Raschke. Plasmonic nanofocused four-wave mixing for femtosecond near-field imaging. Nat Nanotechnol, 459-464(2016).

[5] G Deka, CK Sun, K Fujita, SW Chu. Nonlinear plasmonic imaging techniques and their biological applications. Nanophotonics, 31-49(2017).

[6] K Frischwasser, K Cohen, J Kher-Alden, S Dolev, S Tsesses et al. Real-time sub-wavelength imaging of surface waves with nonlinear near-field optical microscopy. Nat Photonics, 442-448(2021).

[7] K Wang, JG Titchener, SS Kruk, L Xu, HP Chung et al. Quantum metasurface for multiphoton interference and state reconstruction. Science, 1104-1108(2018).

[8] T Stav, A Faerman, E Maguid, D Oren, V Kleiner et al. Quantum entanglement of the spin and orbital angular momentum of photons using metamaterials. Science, 1101-1104(2018).

[9] G Marino, AS Solntsev, L Xu, VF Gili, L Carletti et al. Spontaneous photon-pair generation from a dielectric nanoantenna. Optica, 1416-1422(2019).

[10] T Santiago-Cruz, A Fedotova, V Sultanov, MA Weissflog, D Arslan et al. Photon pairs from resonant metasurfaces. Nano Lett, 4423-4429(2021).

[11] M Parry, A Mazzanti, AN Poddubny, Valle G Della, DN Neshev et al. Enhanced generation of nondegenerate photon pairs in nonlinear metasurfaces. Advanced Photonics, 055001(2021).

[12] J Liu, MQ Shi, Z Chen, SM Wang, ZL Wang et al. Quantum photonics based on metasurfaces. Opto-Electron Adv, 200092(2021).

[13] GX Li, S Zhang, T Zentgraf. Nonlinear photonic metasurfaces. Nat Rev Mater, 17010(2017).

[14] G Grinblat. Nonlinear dielectric nanoantennas and metasurfaces: frequency conversion and wavefront control. ACS Photonics, 3406-3432(2021).

[15] C Gigli, G Leo. All-dielectric χ(2) metasurfaces: recent progress. Opto-Electron Adv, 210093(2022).

[16] R Fu, KX Chen, ZL Li, SH Yu, GX Zheng. Metasurface-based nanoprinting: principle, design and advances. Opto-Electron Sci, 220011(2022).

[17] L Bonacina, PF Brevet, M Finazzi, M Celebrano. Harmonic generation at the nanoscale. J Appl Phys, 230901(2020).

[18] XW Gao, CW Hsu, B Zhen, X Lin, JD Joannopoulos et al. Formation mechanism of guided resonances and bound states in the continuum in photonic crystal slabs. Sci Rep, 31908(2016).

[19] JC Jin, J Lu, B Zhen. Resonance-forbidden second-harmonic generation in nonlinear photonic crystals. Nanophotonics, 4233-4239(2021).

[20] LJ Huang, YL Yu, LY Cao. General modal properties of optical resonances in subwavelength nonspherical dielectric structures. Nano Lett, 3559-3565(2013).

[21] LJ Huang, L Xu, M Rahmani, DN Neshev, AE Miroshnichenko. Pushing the limit of high-Q mode of a single dielectric nanocavity. Adv Photonics, 016004(2021).

[22] D Smirnova, YS Kivshar. Multipolar nonlinear nanophotonics. Optica, 1241-1255(2016).

[23] J H Cui, X L Ma, M B Pu et al. Extraordinary strong optical rotation in weak chiral metasurface. Opto-Electron Eng, 190052(2020).

[24] J Lyu, F Rondepierre, C Jonin, PF Brevet, C Hamon et al. Shape-controlled second-harmonic scattering from gold nanotetrapods. J Phys Chem C, 9831-9835(2022).

[25] M Celebrano, D Rocco, M Gandolfi, A Zilli, F Rusconi et al. Optical tuning of dielectric nanoantennas for thermo-optically reconfigurable nonlinear metasurfaces. Opt Lett, 2453-2456(2021).

[26] L Carletti, A Zilli, F Moia, A Toma, M Finazzi et al. Steering and encoding the polarization of the second harmonic in the visible with a monolithic LiNbO3 metasurface. ACS Photonics, 731-737(2021).

[27] PP Vabishchevich, S Liu, MB Sinclair, GA Keeler, GM Peake et al. Enhanced second-harmonic generation using broken symmetry III–V semiconductor fano metasurfaces. ACS Photonics, 1685-1690(2018).

[28] FJF Löchner, AN Fedotova, S Liu, GA Keeler, GM Peake et al. Polarization-dependent second harmonic diffraction from resonant GaAs metasurfaces. ACS Photonics, 1786-1793(2018).

[29] S Liu, MB Sinclair, S Saravi, GA Keeler, YM Yang et al. Resonantly enhanced second-harmonic generation using III–V semiconductor all-dielectric metasurfaces. Nano Lett, 5426-5432(2016).

[30] KI Okhlopkov, A Zilli, A Tognazzi, D Rocco, L Fagiani et al. Tailoring third-harmonic diffraction efficiency by hybrid modes in high-Q metasurfaces. Nano Lett, 10438-10445(2021).

[31] M Gandolfi, A Tognazzi, D Rocco, Angelis C De, L Carletti. Near-unity third-harmonic circular dichroism driven by a quasibound state in the continuum in asymmetric silicon metasurfaces. Phys Rev A, 023524(2021).

[32] L Xu, DA Smirnova, R Camacho-Morales, RA Aoni, KZ Kamali et al. Enhanced four-wave mixing from multi-resonant silicon dimer-hole membrane metasurfaces. New J Phys, 035002(2022).

[33] L Carletti, SS Kruk, AA Bogdanov, Angelis C De, Y Kivshar. High-harmonic generation at the nanoscale boosted by bound states in the continuum. Phys Rev Res, 023016(2019).

[34] CW Hsu, B Zhen, AD Stone, JD Joannopoulos, M Soljačić. Bound states in the continuum. Nat Rev Mater, 16048(2016).

[35] AP Anthur, HZ Zhang, R Paniagua-Dominguez, DA Kalashnikov, ST Ha et al. Continuous wave second harmonic generation enabled by quasi-bound-states in the continuum on gallium phosphide metasurfaces. Nano Lett, 8745-8751(2020).

[36] K Koshelev, YT Tang, KF Li, DY Choi, GX Li et al. Nonlinear metasurfaces governed by bound states in the continuum. ACS Photonics, 1639-1644(2019).

[37] L Xu, Kamali K Zangeneh, LJ Huang, M Rahmani, A Smirnov et al. Dynamic nonlinear image tuning through magnetic dipole quasi-BIC ultrathin resonators. Adv Sci, 1802119(2019).

[38] CW Hsu, B Zhen, J Lee, SL Chua, SG Johnson et al. Observation of trapped light within the radiation continuum. Nature, 188-191(2013).

[39] XF Yin, JC Jin, M Soljačić, C Peng, B Zhen. Observation of topologically enabled unidirectional guided resonances. Nature, 467-471(2020).

[40] PL Hong, L Xu, M Rahmani. Dual bound states in the continuum enhanced second harmonic generation with transition metal dichalcogenides monolayer. Opto-Electron Adv, 200097(2022).

[41] QL Yang, MK Liu, S Kruk, YH Xu, YK Srivastava et al. Polarization-sensitive dielectric membrane metasurfaces. Adv Opt Mater, 2000555(2020).

[42] QL Yang, S Kruk, YH Xu, QW Wang, YK Srivastava et al. Mie-resonant membrane huygens’ metasurfaces. Adv Funct Mater, 1906851(2020).

[43] A Tognazzi, D Rocco, M Gandolfi, A Locatelli, L Carletti et al. High quality factor silicon membrane metasurface for intensity-based refractive index sensing. Optics, 193-199(2021).

[44] JC Jin, XF Yin, LF Ni, M Soljačić, B Zhen et al. Topologically enabled ultrahigh-Q guided resonances robust to out-of-plane scattering. Nature, 501-504(2019).

[45] PN Burns, DH Simpson, MA Averkiou. Nonlinear imaging. Ultrasound Med Biol, S19-S22(2000).

[46] M Del Rocio Camacho-Morales, D Rocco, L Xu, VF Gili, N Dimitrov et al. Infrared upconversion imaging in nonlinear metasurfaces. Adv Photonics, 036002(2021).

[47] C Schlickriede, SS Kruk, L Wang, B Sain, Y Kivshar et al. Nonlinear imaging with all-dielectric metasurfaces. Nano Lett, 4370-4376(2020).

[48] SG Johnson, JD Joannopoulos. Block-iterative frequency-domain methods for Maxwell’s equations in a planewave basis. Opt Express, 173-190(2001).

[49] Y He, GT Guo, TH Feng, Y Xu, AE Miroshnichenko. Toroidal dipole bound states in the continuum. Phys Rev B, 161112(2018).

[50] EA Gurvitz, KS Ladutenko, PA Dergachev, AB Evlyukhin, AE Miroshnichenko et al. The high-order toroidal moments and anapole states in all-dielectric photonics. Laser Photonics Rev, 1800266(2019).

[51] P Grahn, A Shevchenko, M Kaivola. Electromagnetic multipole theory for optical nanomaterials. New J Phys, 093033(2012).

[52] S Campione, S Liu, LI Basilio, LK Warne, WL Langston et al. Broken symmetry dielectric resonators for high quality factor Fano Metasurfaces. ACS Photonics, 2362-2367(2016).

[53] ZJ Liu, Y Xu, Y Lin, J Xiang, TH Feng et al. High-Q quasibound states in the continuum for nonlinear metasurfaces. Phys Rev Lett, 253901(2019).

[54] I Volkovskaya, L Xu, LJ Huang, AI Smirnov, AE Miroshnichenko et al. Multipolar second-harmonic generation from high-Q quasi-BIC states in subwavelength resonators. Nanophotonics, 3953-3963(2020).

[55] MR Shcherbakov, DN Neshev, B Hopkins, AS Shorokhov, I Staude et al. Enhanced third-harmonic generation in silicon nanoparticles driven by magnetic response. Nano Lett, 6488-6492(2014).

[56] YM Yang, WY Wang, A Boulesbaa, II Kravchenko, DP Briggs et al. Nonlinear Fano-resonant dielectric metasurfaces. Nano Lett, 7388-7393(2015).