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    Journals >Acta Optica Sinica >Volume 4 >Issue 2 >Page 149 > Article
    • Acta Optica Sinica
    • Vol. 4, Issue 2, 149 (1984)
    Ultraviolet-visible ellipsometric spectra and optical constants of sputtered amorphous silicon
    CHEN SHUGUANG, JIANG RENRONG, and MO DANG
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    CHEN SHUGUANG, JIANG RENRONG, MO DANG. Ultraviolet-visible ellipsometric spectra and optical constants of sputtered amorphous silicon[J]. Acta Optica Sinica, 1984, 4(2): 149 Copy Citation Text show less
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    CHEN SHUGUANG, JIANG RENRONG, MO DANG. Ultraviolet-visible ellipsometric spectra and optical constants of sputtered amorphous silicon[J]. Acta Optica Sinica, 1984, 4(2): 149
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