• Acta Optica Sinica
  • Vol. 4, Issue 2, 149 (1984)
CHEN SHUGUANG, JIANG RENRONG, and MO DANG
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  • [in Chinese]
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    CHEN SHUGUANG, JIANG RENRONG, MO DANG. Ultraviolet-visible ellipsometric spectra and optical constants of sputtered amorphous silicon[J]. Acta Optica Sinica, 1984, 4(2): 149 Copy Citation Text show less

    Abstract

    The optical properties of sputtered amorphous silicon have been measured with an ultraviolet-visible spectroscopic ellipsometer constructed by the authors. The ultraviolet-visible n~? and k~? relations for the amorphous silicon sputtered in various H partial pressures have been obtained and discussed.
    CHEN SHUGUANG, JIANG RENRONG, MO DANG. Ultraviolet-visible ellipsometric spectra and optical constants of sputtered amorphous silicon[J]. Acta Optica Sinica, 1984, 4(2): 149
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