[1] Chunlei DU,Xiaochun DONG,Qiling DENG,et al.Profile control technology for high performance microlens array[J].Opt.Eng,2004,43:2840-2844.

[2] D.KWO,G.DAMAS,W.ZMEK.A Hartmann-Shack wavefront sensor using a binary optical lenslet array[J].SPIE,1991,1544:66-74.

[3] M.P.RAO,M.F.AIMI,N.C.MACDONALD.Single-mask,three-dimensional microfabrication of high-aspect-ratio structures in bulk silicon using reactive ion etching lag and sacrificial oxidation[J].Applied Physics Letters,2004,85(25):6281-6283.

[4] X-C YUAN,W.X YU,N.Q.NGO,et al.Cost-effective fabrication ofmicrolenses on hybrid solgel glass with a high-energy beam-sensitive gray-scale mask[J].Opt.Express,2002,10:303-308.

[5] P.(A)YR(A)S,J.T.RANTALA,R.LEVY,et al.Multilevel structures in soigel thin films with a single UV-exposure using a gray-scale mask[J].Thin Solid films,1999,352:9-12.

[6] OPPLIGER P.SIXT,J.M.STAUFFER,J.M.MAYER,et al.One-step 3D shaping using a gray-tone mask for optical and microelectronic applications[J].Mieroelectron.Eng,1994,23:449-454.