With the rapid development of communication industry, especially mobile communication, the low-end frequency of radio spectrum has become saturated. Using various modulation methods or multiple access technologies to expand the capacity of communication system and improve the utilization of spectrum can not meet the needs of future communication development. Therefore, the realization of high-speed and broadband wireless communication is bound to develop new spectrum resources to microwave high-frequency band. Millimeter wave can effectively solve many problems faced by high-speed broadband wireless access because of its short wavelength and wide frequency band, so it has a wide application prospect in short-range wireless communication. Various semiconductor devices are the hardware basis of information and communication technology (ICT). Creative research and development of emerging semiconductor technologies and circuits to meet the application of millimeter wave wireless communication is the main technical driver to improve the capacity of communication system and solve the key problems of building a new generation of communication system. Along the innovation and development of millimeter wave semiconductor device technology, this paper analyzed and summarized the development trend of millimeter wave system and device technology of the fifth and sixth generation mobile communication technologies (5G and 6G) from the system architecture, semiconductor materials and technology, device design and packaging test of key technologies such as phased array. Taking the MADAS program of DARPA as an example, this paper explained the research frontier and progress of military millimeter wave device technology.