Development of bolometer detector array made of Mn-Co-Ni-Othin films

ZHANG Lei-Bo; HOU Yun; ZHOU Wei; HUANG Zhi-Ming; CHU Jun-Hao

doi:10.3724/sp.j.1010.2014.00359

[1] Choudhary R J, Ogale A S, Shinde S R, et al. Evaluation of manganite films on silicon for uncooled bolometric applications［J］. Appl. Phys. Lett., 2004, 84(19): 3846-3848.

[2] Vedel C, MartinJ L, Ouvrier-Buffet J L, et al. Amorphous silicon based uncooled microbolometer IRFPA ［J］. Proc. SPIE, 1999, 3698: 276-283.

[3] Sedky S, Fiorini P, Caymax M, et al. IR bolometers made of polycrystalline silicon germanium ［J］. Sens. Actuator A, 1998, 66(13): 193-199.

[4] Dong L Yue R F, Liu L T. Characterization of uncooled poly SiGe microbolometer for infrared detection ［J］. Chinese Phys. Lett, 2003, 20(5): 770-773.

[5] Jahanzeb A, Travers C M, Celik-Butler Z, et al. A semiconductor YBaCuO microbolometer for room temperature IR imaging ［J］. IEEE Trans. Electron. Devices, 1997, 44(10): 1795-1801.

[6] Baliga S, Rost M, Doctor A. Sputtered film thermistor IR detectors ［J］. Proc SPIE, 1994, 2225: 7278.

[7] Umadevi P, Nagendra C L. Preparation and characterization of transition metal oxide micro-thermistors and their application to immersed thermistor bolometer infrared detectors ［J］. Sens. Actuator A, 2002, 96(23): 114-124.

[8] Hou Y, Huang Z M, Gao Y Q, et al. Characterization of Mn1.56Co0.96Ni0.48O4films for infrared detection ［J］. Appl. Phys. Lett., 2008, 92(20): 202115-3.

[9] Schmidt R, Basu A, Brinkman A W. Production of NTCR thermistor devices based on NiMn2O4+δ［J］. J Eur Ceram Soc, 2004, 24(6): 1233-1236.

[10] Rogalski A. Infrared detector ［M］. 2nd ed. America: CRC Press, 2011: 45-46.

[11] Dorris S E, Mason T O. Electrical properties and cation valencies in Mn3O4 ［J］. J.Am. Ceram. Soc, 1988, 71(5): 379-385.

[12] Fardmanesh M, Rothwarf A, Scoles K J. YBa2Cu3O7-δinfrared bolometers: Temperature-dependent responsivity and deviations form the dR/dT curve ［J］.J. appl. Phys, 1995, 77(9): 4568-4575.

[13] Yaradanakul A, Butler D P, Butler Z C. Uncooled infrared microbolometers on a flexible substrate ［J］. IEEE Trans. Electron. Devices, 2002, 49(5): 930-933.

[14] Nahum M, Verghese S, Richards P L. Thermal boundary resistance for YBaCu3O7-δfilms ［J］. Appl. Phys. Lett., 1991, 59: 20342036.

[15] Mechin L, Routoure J M, Guillet B, et al. Uncooled bolometer response of a low noise La2/3Sr1/3MnO3 thin film ［J］. Appl. Phys. Lett., 2005, 87: 204103-3.

[16] Lisauskas A, Khartsev S I, Grishin A. Tailoring the colossal magnetoresistivity: La0.7 (Pb0.63Sr0.37)0.3MnO3 thin-film uncooled bolometer ［J］. Appl. Phys. Lett., 2000, 77(5): 756-758.