• Journal of Infrared and Millimeter Waves
  • Vol. 33, Issue 4, 359 (2014)
ZHANG Lei-Bo*, HOU Yun, ZHOU Wei, HUANG Zhi-Ming, and CHU Jun-Hao
Author Affiliations
  • [in Chinese]
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    DOI: 10.3724/sp.j.1010.2014.00359 Cite this Article
    ZHANG Lei-Bo, HOU Yun, ZHOU Wei, HUANG Zhi-Ming, CHU Jun-Hao. Development of bolometer detector array made of Mn-Co-Ni-Othin films[J]. Journal of Infrared and Millimeter Waves, 2014, 33(4): 359 Copy Citation Text show less

    Abstract

    The 2×8 element MnCoNiOdetector array was successfully fabricated with photolithography and wet-chemical etching process. It was shown that the negative temperature coefficient of resistance of the film reaches -3.8% K-1 at room temperature. The typical element of the fabricated detector array exhibits responsivity of about 107V/W and detectivity of about 2×107cmHz1/2/W respectively at bias voltage of ±15V and chopping frequency of 10Hz. The response uniformity of the linear array bolometers is about 5.9%. Our results proved the feasibility of MnCoNiOfilms for linear array bolometer applications, which can possibility be used as new-type uncooled bolometer detectors.
    ZHANG Lei-Bo, HOU Yun, ZHOU Wei, HUANG Zhi-Ming, CHU Jun-Hao. Development of bolometer detector array made of Mn-Co-Ni-Othin films[J]. Journal of Infrared and Millimeter Waves, 2014, 33(4): 359
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