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    Journals >Acta Optica Sinica >Volume 34 >Issue 8 >Page 811001 > Article
    • Acta Optica Sinica
    • Vol. 34, Issue 8, 811001 (2014)
    Active Compensation of Thermal Aberrations in Lithographic Projection Lens
    Chen Hua*, Su Dongqi, Sui Yongxin, Zhang Mingchao, Tian Wei, Yang Huaijiang, and Zhang Wei
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    DOI: 10.3788/aos201434.0811001 Cite this Article Set citation alerts
    Chen Hua, Su Dongqi, Sui Yongxin, Zhang Mingchao, Tian Wei, Yang Huaijiang, Zhang Wei. Active Compensation of Thermal Aberrations in Lithographic Projection Lens[J]. Acta Optica Sinica, 2014, 34(8): 811001 Copy Citation Text show less
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    Chen Hua, Su Dongqi, Sui Yongxin, Zhang Mingchao, Tian Wei, Yang Huaijiang, Zhang Wei. Active Compensation of Thermal Aberrations in Lithographic Projection Lens[J]. Acta Optica Sinica, 2014, 34(8): 811001
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