• Microelectronics
  • Vol. 52, Issue 1, 91 (2022)
HOU Jiali1, HU Yi1, HE Junmin2, and WANG Yuan2、3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: 10.13911/j.cnki.1004-3365.210312 Cite this Article
    HOU Jiali, HU Yi, HE Junmin, WANG Yuan. A Latch-Up Immunity Multi-Embedded-Well SCR ESD Device[J]. Microelectronics, 2022, 52(1): 91 Copy Citation Text show less
    References

    [1] AMERASEKERA A, DUVVURY C. ESD in silicon integrated circuits [M]. New York: John Wiley & Sons, 2002: 77-95.

    [2] LU T C, GUO J C, WANG T, et al. Design strategy of MLSCR devices for sub-micron CMOS technology [C] // IEEE Int Symp VLSI Technol Syst & Appl. Taibei, China. 1997: 241-244.

    [3] CHATTERJEE A, POLGREEN T. A low voltage triggering SCR for on-chip ESD protection at output and inputs pads [J]. IEEE Elec Dev Lett, 1991, 12(1): 21-22.

    [4] LIU Z W, LIOU J J, DONG S R, et al. Silicon controlled rectifier stacking structure for high voltage ESD protection applications [J]. IEEE Elec Dev Lett, 2010, 31(8): 845-847.

    [5] ZHANG P, WANG Y, ZHANG X, et al. Novel silicon-controlled rectifier (SCR) for digital and high-voltage ESD power supply clamp [J]. Sci China Info Sci, 2014, 57(2): 029401.

    [6] HUANG X Z, LIOU J J, LIU Z W. A new high holding voltage dual-direction SCR with optimized segmented topology [J]. IEEE Elec Dev Lett, 2016, 37(10): 1311-1313.

    [8] WANG Y Z, HE J M, HU Y, et al. Study of silicon controlled rectifier devices with different dimensions for ESD protection [C] // Int Conf Sol Sta & Integr Circ Tech. Kunming, China. 2020: 9278319.

    [9] HE J M, WANG Y Z, HU Y, et al. Improvement of failure current in modified later silicon-controlled rectifier device with n-type floating region [C] // Int Conf Sol Sta & Integr Circ Tech. Kunming, China. 2020: 9278333.

    [10] CHEN R B, LIU H X, SONG W Q, et al. Robust and latch-up-immune LVTSCR device with an embedded PMOSFET for ESD protection in a 28-nm CMOS process [J]. Nanoscale Res Lett, 2020, 15(11): 212.

    [11] DAI C T, KER M D. Comparison between high-holding-voltage SCR and stacked low-voltage devices for ESD protection in high-voltage applications [J]. IEEE Trans Elec Dev, 2018, 65(2): 798-802

    [12] SONG S, DU F B, HOU F, et al. A new dual directional SCR with high holding voltage for high voltage ESD protection [C] // Int Conf Elec Dev Sol Sta Circ. Xi’an, China. 2019: 8754152.

    [14] KWAK J C. Design of fabrication of ESD protection circuit with high holding voltage for power IC [J]. Int J Elec, 2017, 104(12): 2090-2098.

    HOU Jiali, HU Yi, HE Junmin, WANG Yuan. A Latch-Up Immunity Multi-Embedded-Well SCR ESD Device[J]. Microelectronics, 2022, 52(1): 91
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