Epitaxial graphene gas sensors on SiC substrate with high sensitivity

Cui Yu; Qingbin Liu; Zezhao He; Xuedong Gao; Enxiu Wu; Jianchao Guo; Chuangjie Zhou; Zhihong Feng

doi:10.1088/1674-4926/41/3/032101

Journals >Journal of Semiconductors >Volume 41 >Issue 3 >Page 032101 > Article

Journal of Semiconductors
Vol. 41, Issue 3, 032101 (2020)

Epitaxial graphene gas sensors on SiC substrate with high sensitivity

Cui Yu¹, Qingbin Liu¹, Zezhao He¹, Xuedong Gao¹, Enxiu Wu², Jianchao Guo¹, Chuangjie Zhou¹, and Zhihong Feng¹

Author Affiliations

¹National Key Laboratory of ASIC, Hebei Semiconductor Research Institute, Shijiazhuang 050051, China

²College of Precision Instrument and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China

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DOI: 10.1088/1674-4926/41/3/032101 Cite this Article

Cui Yu, Qingbin Liu, Zezhao He, Xuedong Gao, Enxiu Wu, Jianchao Guo, Chuangjie Zhou, Zhihong Feng. Epitaxial graphene gas sensors on SiC substrate with high sensitivity[J]. Journal of Semiconductors, 2020, 41(3): 032101 Copy Citation Text

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Fig. 1. (Color online) Raman spectra of (a) graphene samples A and B and the SiC substrate, and (b) graphene samples C, D, and E.

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(Color online) Sensor responses for (a, b) NO2 and (c, d) NH3.

Fig. 2. (Color online) Sensor responses for (a, b) NO₂ and (c, d) NH₃.

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Fig. 3. (Color online) Schematic illustration of (a) the Fermi level shift and (b) resistance due to NO₂ doping for n-type EG and p-type QFSEG and CVD-EG.

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Sample name	Graphene material	Growth method	SF₆ plasma treatment	Carrier type	Layer number
A	EG	SiC sublimation	Without	n	1
B	EG	SiC sublimation	7 s	n	1
C	QFSEG	SiC sublimation + H intercalation	10 s	p	2
D	QFSEG	SiC sublimation + H intercalation	7 s	p	2
E	CVD-EG	CVD	Without	p	1

Table 1. Graphene samples used for gas sensors.

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Sample		Original resistance (Ω)	NO₂ concentration (ppm)					DL (ppb)
Sample		Original resistance (Ω)	0.4	0.8	1	2	4	DL (ppb)
Sensitivity to NO₂ gas	A	335	14.0%	22.8%	28.2%	33.5%	40.8%	1
	B	396	40.0%	53.9%	63.5%	74.6%	105.1%	2
	C	292	5.0%	7.2%	8.3%	9.3%	10.7%	60
	D	315	4.0%	4.7%	5.0%	5.4%	5.8%	70
	E	296	0.9%	2.5%	3.4%	5.3%	7.4%	50

Table 2. Sensitivity of the graphene gas sensors to NO₂ gas and their detection limit (DL).

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