Micro-angle Measurement Method and Its Accuracy Evaluation Based on Fabry-Perot Etalon

Yuan LIU; Xiaoyan SHEN; Shinan ZHOU; Xubo GUO; Jing YU; Dongsheng LI; Xuhui LAN

doi:10.3788/gzxb20215007.0712004

[1] Jingang ZHONG, Xianhua ZHANG, Zhixiang JU. Absolute small-angle measurement based on optical feedback interferometry. Chinese Optics Letters, 6, 830-832(2008).

[2] Y TANFER, O BULENT, K NURAY. High precision small angle generator for realization of the SI unit of plane angle and calibration of high precision autocollimators. Measurement Science and Technology, 23(2012).

[3] J A KIM, J W KIM, C S KANG et al. Calibration of angle artifacts and instruments using a high precision angle generator. International Journal of Precision Engineering & Manufacturing, 14, 367-371(2013).

[4] M C HSIEH, J Y LIN, Y F CHEN et al. Measurement of small angle based on a （100） silicon wafer and heterodyne interferometer. Optical Review, 23, 487-491(2016).

[5] V HEIKKINEN, V BYMAN, I PALOSUO et al. Interferometric 2D small angle generator for autocollimator calibration. Metrologia, 54, 253-261(2017).

[6] Junhong GAN, Jiugui ZOU, Guoding JI. Application of area array CCD in dual-axis autocollimator. Infrared and Laser Engineering, 37, 60-62(2008).

[7] Beijing Institute of Aerospace Metrology and Testing Technology. https：//kns.cnki.net/kcms/detail/detail.aspx

[8] Junjie ZHANG, Zhengyang LI, Shenghua YE. Adopting optical amplification to improve the resolution of photoelectric autocollimator. Chinese Journal of Sensors and Actuators, 24, 50-52(2011).

[9] Xinran TAN, Fan ZHU, Chao WANG et al. Improved accuracy of capacitive sensor-based micro-angle measurement with angular-to-linear displacement conversion. Review of Scientific Instruments, 88, 115104(2017).

[10] Yumin WU, Haobo CHENG, Yongfu WEN. High-precision rotation angle measurement method based on a lensless digital holographic microscope. Applied Optics, 57, 112-118(2018).

[11] Yun HE, Qi LIU, Jingjing HE et al. External right-angle measurement using a two-autocollimator system. Applied Optics, 58, 1158-1163(2019).

[12] Henian ZHU, Zhigang XIAO, Yufei HOU et al. A Fabry-Perot etalon method for measuring focal length and rotationangle. CN.

[13] Xiaoyan SHEN, Zhipeng SUN, Jiacheng HU et al. Method for measuring focal length of transmission objective lens based on F-P etalon. Chinese Journal of Scientific Instrument, 39, 1-8(2018).

[14] Xiaoyan SHEN, Xuhui LAN, Henian ZHU et al. Submicron displacement measurement method based on Fabry-Perot etalon. Chinese Journal of Lasers, 46, 1204002(2019).

[15] Xuhui LAN, Xiaoyan SHEN, Zhipeng SUN et al. Subdivision of area array pixels for Fabry-Perot etalon interval measurement. Journal of Applied Optics, 40, 99-104(2019).

[16] Henian ZHU. Lecture on new concept basic physics experiment, 16-17(2013).

[17] (2013).