• Acta Photonica Sinica
  • Vol. 50, Issue 7, 161 (2021)
LIU Yuan1, SHEN Xiaoyan1, ZHOU Shinan1, GUO Xubo2, YU Jing1, LI Dongsheng1, and LAN Xuhui1
Author Affiliations
  • 1College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou3008, China
  • 2Department of Physics, Tsinghua University, Beijing100084, China
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    Abstract

    A micro-angle measurement method based on Fabry-Perot etalon is proposed. Particularly, by calculating the displacement of center of the imaging concentric rings and the focal length of the imaging objective lens, the micro angle of the deflected mirror is obtained. The evaluation model of the micro angle uncertainty, based on the uncertainty components of the center displacement and the focal length of the imaging objective lens, is constructed. The Fabry-Perot etalon with an interval of 2 mm is selected to carry out the experimental research on the measurement of micro angles, and the data is processed. The experimental results indicate that the maximum measurement uncertainty is 0.132" and 0.045" in the range of 600" and 40", respectively. The proposed method can provide a reference for the realization of the self-calibrated, higher-accuracy micro-angle measurement.
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    Yuan LIU, Xiaoyan SHEN, Shinan ZHOU, Xubo GUO, Jing YU, Dongsheng LI, Xuhui LAN. Micro-angle Measurement Method and Its Accuracy Evaluation Based on Fabry-Perot Etalon[J]. Acta Photonica Sinica, 2021, 50(7): 161
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    Category: Instrumentation, Measurement and Metrology
    Received: Nov. 17, 2020
    Accepted: Jan. 11, 2021
    Published Online: Sep. 1, 2021
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