The systematic characterization and accurate detection of subsurface damage (SSD) are the key to controlling the surface damage in the processing of optical materials. The research progresses on the detection and evaluation methods of SSD in optical materials are reviewed by combining the SSD characterization methods and the detection technologies. The structures and the characterization parameters of SSD induced by the ultra-precision machining are analyzed. Several typical destructive detection technologies and their technical features and application ranges are introduced aiming at the geometric characterization parameters of SSD. Several non-destructive detection technologies which meet the detection requirements of ultra-precision machining are introduced emphatically, and their technical advantages and development bottlenecks are also analyzed. The comparison for the SSD characterization and detection technologies between at home and abroad is performed, and the developing trend of SSD detection technology is presented.