• Journal of Semiconductors
  • Vol. 42, Issue 3, 030203 (2021)
Wensi Cai1, Zhigang Zang1, and Liming Ding2
Author Affiliations
  • 1Key Laboratory of Optoelectronic Technology & Systems (MoE), Chongqing University, Chongqing 400044, China
  • 2Center for Excellence in Nanoscience (CAS), Key Laboratory of Nanosystem and Hierarchical Fabrication (CAS), National Center for Nanoscience and Technology, Beijing 100190, China
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    DOI: 10.1088/1674-4926/42/3/030203 Cite this Article
    Wensi Cai, Zhigang Zang, Liming Ding. Self-assembled monolayers enhance the performance of oxide thin-film transistors[J]. Journal of Semiconductors, 2021, 42(3): 030203 Copy Citation Text show less
    References

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    [2] M T Vijjapu, S G Surya, S Yuvaraja et al. Fully integrated indium gallium zinc oxide NO2 gas detector. ACS Sens, 5, 984(2020).

    [3] E Fortunato, P Barquinha, R Martins. Oxide semiconductor thin-film transistors: A review of recent advances. Adv Mater, 24, 2945(2012).

    [4] K Nomura, H Ohta, A Takagi et al. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors. Nature, 432, 488(2004).

    [5] D Ho, H Jeong, S Choi et al. Organic materials as a passivation layer for metal oxide semiconductors. J Mater Chem C, 8, 14983(2020).

    [6] K Ide, K Nomura, H Hosono et al. Electronic defects in amorphous oxide semiconductors: A review. Phys Status Solidi A, 216, 1800372(2019).

    [7] J S Park, J K Jeong, H J Chung et al. Electronic transport properties of amorphous indium-gallium-zinc oxide semiconductor upon exposure to water. Appl Phys Lett, 92, 072104(2008).

    [8] W Cai, J Wilson, J Zhang et al. Significant performance enhancement of very thin InGaZnO thin-film transistors by a self-assembled monolayer treatment. ACS Appl Electron Mater, 2, 301(2020).

    [9] W Zhong, G Li, L Lan et al. InSnZnO thin-film transistors with vapor- phase self-assembled monolayer as passivation layer. IEEE Electron Device Lett, 39, 1680(2018).

    [10] W Zhong, R Yao, Y Liu et al. Effect of self-assembled monolayers (SAMs) as surface passivation on the flexible a-InSnZnO thin-film transistors. IEEE Trans Electron Devices, 67, 3157(2020).

    [11] S E Lee, H J Na, E G Lee et al. The effect of surface energy characterized functional groups of self-assembled monolayers for enhancing the electrical stability of oxide semiconductor thin film transistors. Nanotechnology, 31, 475203(2020).

    [12] P Xiao, L Lan, T Dong et al. InGaZnO thin-film transistors modified by self-assembled monolayer with different alkyl chain length. IEEE Electron Device Lett, 36, 687(2015).

    [13] A Bashir, P H Wöbkenberg, J Smith et al. High-performance zinc oxide transistors and circuits fabricated by spray pyrolysis in ambient atmosphere. Adv Mater, 21, 2226(2009).

    [14] W Cai, J Zhang, J Wilson et al. Significant performance improvement of oxide thin-film transistors by a self-assembled monolayer treatment. Adv Electron Mater, 6, 1901421(2020).

    Wensi Cai, Zhigang Zang, Liming Ding. Self-assembled monolayers enhance the performance of oxide thin-film transistors[J]. Journal of Semiconductors, 2021, 42(3): 030203
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