• Laser & Optoelectronics Progress
  • Vol. 50, Issue 11, 111403 (2013)
Li Shixiong1、*, Bai Zhongchen2, Chen Deliang1, and Qin Shuijie2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/lop50.111403 Cite this Article Set citation alerts
    Li Shixiong, Bai Zhongchen, Chen Deliang, Qin Shuijie. Research on the Fabrication of Micro Channels in Fused Silica Substrates by Laser-Induced Plasma[J]. Laser & Optoelectronics Progress, 2013, 50(11): 111403 Copy Citation Text show less
    References

    [1] S J Qin, W J Li. Micromachining of complex channel systems in 3D quartz substrates using Q-switched Nd:YAG laser[J]. Appl Phys A, 2002, 74(6): 773-777.

    [2] Fan Yongfa, Qin Shuijie. Optical analysis of the plasma induced by the laser micromaching[J]. Laser & Optoelectronics Progress, 2006, 43(6): 64-67.

    [3] Li Shixiong, Bai Zhongchen, Qin Shuijie. Research on the fabrication of micro channels in fused silica substrates by nanosecond laser[J]. Laser & Optoelectronics Progress, 2012, 49(4): 041401.

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    [11] B Rethfeld, H Krutsch, D H H Hoffmann. Tracing laser-induced dielectric breakdown in solids[J]. Contrib Plasma Phys, 2010, 50(1): 16-20.

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    Li Shixiong, Bai Zhongchen, Chen Deliang, Qin Shuijie. Research on the Fabrication of Micro Channels in Fused Silica Substrates by Laser-Induced Plasma[J]. Laser & Optoelectronics Progress, 2013, 50(11): 111403
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