• Photonics Research
  • Vol. 9, Issue 12, 2511 (2021)
Yingzhi Li1, Baisong Chen1, Quanxin Na2, Qijie Xie2, Min Tao1, Lanxuan Zhang1, Zihao Zhi1, Yuxuan Li1, Xiaobin Liu1, Xianshu Luo3, Guoqiang Lo3, Fengli Gao1, Xueyan Li1, and Junfeng Song1、2、*
Author Affiliations
  • 1State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
  • 2Peng Cheng Laboratory, Shenzhen 518000, China
  • 3Advance Micro Foundry Pte. Ltd., Singapore 117685, Singapore
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    DOI: 10.1364/PRJ.437846 Cite this Article Set citation alerts
    Yingzhi Li, Baisong Chen, Quanxin Na, Qijie Xie, Min Tao, Lanxuan Zhang, Zihao Zhi, Yuxuan Li, Xiaobin Liu, Xianshu Luo, Guoqiang Lo, Fengli Gao, Xueyan Li, Junfeng Song. Wide-steering-angle high-resolution optical phased array[J]. Photonics Research, 2021, 9(12): 2511 Copy Citation Text show less

    Abstract

    Optical phased array (OPA) technology is considered a promising solution for solid-state beam steering to supersede the traditional mechanical beam steering. As a key component of the LIDAR system for long-range detection, OPAs featuring a wide steering angle and high resolution without beam aliasing are highly desired. However, a wide steering range requires a waveguide pitch less than half of the wavelength, which is easily subjected to cross talk. Besides, high resolution requires a large aperture, and it is normally achieved by a high count number of waveguides, which complicates the control system. To solve the mentioned issues, we design two high-performance 128-channel OPAs fabricated on a multilayered SiN-on-SOI platform. Attributed to the nonuniform antenna pitch, only 128 waveguides are used to achieve a 4 mm wide aperture. Besides, by virtue of innovative dual-level silicon nitride (Si3N4) waveguide grating antennas, the fishbone antenna OPA achieves a 100°×19.4° field of view (FOV) with divergence of 0.021°×0.029°, and the chain antenna OPA realizes a 140°×19.23° FOV with divergence of 0.021°×0.1°. To our best knowledge, 140° is the widest lateral steering range in two-dimensional OPA, and 0.029° is the smallest longitudinal divergence. Finally, we embed the OPA into a frequency-modulated continuous-wave system to achieve 100 m distance measurement. The reflected signal from 100 m distance is well detected with 26 dBm input transmitter power, which proves that OPA serves as a promising candidate for transceiving optical signal in a LIDAR system.
    Yingzhi Li, Baisong Chen, Quanxin Na, Qijie Xie, Min Tao, Lanxuan Zhang, Zihao Zhi, Yuxuan Li, Xiaobin Liu, Xianshu Luo, Guoqiang Lo, Fengli Gao, Xueyan Li, Junfeng Song. Wide-steering-angle high-resolution optical phased array[J]. Photonics Research, 2021, 9(12): 2511
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