Research of high-performance uncooled infrared focal plane array detector with common-leg structure

Yaqin Wang; Guangyan Cai; Zhanfeng Ma; Jianfei Gao; Li Huang

doi:10.3788/IRLA20200330

[1] Niklaus F, Vieider C, Jakobsen H. MEMSbased uncooled infrared bolometer arrays: a review[C]MEMSMOEMS technologies applications, III, 2008, 6836: 68360D.

[2] Shuyu Lei, Hui Fang, Jun Liu, et al. Research on domestic 640×512 uncooled VOx infrared focal plane array. Infrared Technology, 35, 759-763(2013).

[3] Hay K A. Large fmat VOx microbolometer UFPA development at ITC[C]Infrared Detects Focal Plane Arrays, VIII, 2006, 6295: 629505.

[4] Li C, Han C J, Skidme G D, et al. DRS uncooled VOx infrared detect development production status[C]Infrared Technology Applications, XXXVI, 2010, 7660: 76600V.

[5] A Rogalski. Infrared detectors: An overview. Infrared Physics & Technology, 43, 187-210(2002).

[6] D A Scribner, M R Kruer, J M Killiany. Infrared focal plane array technology. Proceedings of the IEEE, 79, 66-85(1991).

[7] Becker S, Imperiti P, Yon J J, et al. Latest pixel size reduction of uncooled IRFPA at CEA, LETI[C]ElectroOptical Infrared Systems: Technology Applications, IX, 2012, 8541: 85410C.

[8] Tao Feng, Weiqi Jin, Junjie Si. Uncooled infrared FPA--A review and forecast. Infrared Technology, 37, 177-184(2015).

[9] M Kimata, T Tokuda, A Tsuchinaga, et al. Vacuum packaging technology for uncooled infrared sensor. IEEE Transactions on Electrical and Electronic Engineering, 5, 175-180(2010).

[10] Y Zhao, M Y Mao, R Horowitz, et al. Optomechanical uncooled infrared imaging system: design, microfabrication, and performance. Journal of Microelectromechanical Systems, 11, 136-146(2002).

[11] Chuanming Liu, Libin Yao. Study on digital readout circuit for infrared FPA detectors. Infrared Technology, 34, 125-133(2012).

[12] C C Li, C J Han, G D Skidmore. Overview of DRS uncooled VOx infrared detector development. Optical Engineering, 50, 061017(2011).