Yaqin Wang, Guangyan Cai, Zhanfeng Ma, Jianfei Gao, Li Huang. Research of high-performance uncooled infrared focal plane array detector with common-leg structure[J]. Infrared and Laser Engineering, 2021, 50(3): 20200330
- Infrared and Laser Engineering
- Vol. 50, Issue 3, 20200330 (2021)
Fig. 1. One-layer structure of microbolometer
Fig. 2. Double-layer structure of microbolometer
Fig. 3. Double-layer (umbrella) structure of microbolometer
Fig. 4. Plane schematic (a) and 3-D diagram (b) of common-leg structure
Fig. 5. Layout of common-leg width with 0.35 μm and 0.5 μm
Fig. 6. Outline of micro bridge fabrication process
Fig. 7. Components of IRFPA metallic package
Fig. 8. Map of non_effective pixels
Fig. 9. Noise histogram
Fig. 10. NETD histogram
Fig. 11. Responsivity histogram
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Table 1. [in Chinese]
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