• Acta Optica Sinica
  • Vol. 32, Issue 9, 922001 (2012)
Zhao Lei* and Gong Yan
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/aos201232.0922001 Cite this Article Set citation alerts
    Zhao Lei, Gong Yan. Design and Analysis for the High-Precision Lens Support Structure of Objective Lens for Lithography[J]. Acta Optica Sinica, 2012, 32(9): 922001 Copy Citation Text show less
    References

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    [2] Zeng Chunmei, Guo Peiji, Yu Jingchi. Deformation and analysis on correction of 0.5 m ultra-thin mirror with active support[J]. Optics & Precision Engineering, 2010, 18(3): 570~578

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    [6] Wang Yang, Zhang Jingxu. Optimization and analysis for the support of the large aperture telescope primary mirror[J]. Opto-Electronic Engineering, 2009, 36(1): 107~113

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    [8] Zhang Jian, Liu Weiqi, Wang Rudong et al.. Effect of gravity deformation on optical performance of super-accuracy Fizeau interferometer[J]. Acta Optica Sinica, 2011, 31(7): 0712001

    [9] Wang Ping, Tian Wei, Wang Rudong et al.. Rotation chuck test for removing chuck error of optical surface[J]. Acta Optica Sinica, 2011, 31(8): 0812004

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    [3] ZHANG Yun, LIU Lihui, LI Yanqiu, LIU Yan. Effect of Gravity Deformation on the Wavefront of 90 nm Deep Ultraviolet Lithography Projection Optics[J]. Opto-Electronic Engineering, 2015, 42(3): 71

    [4] Zhang Defu, Li Xianling. Effect of Adjusting Force on Surface Figure of Lens in Eccentric Adjusting Mechanism[J]. Chinese Journal of Lasers, 2014, 41(7): 716004

    [5] Sun Zhen, Gong Yan. Design of V-Flexure Axial Adjusting Mechanism of Lithograph Projection Objective[J]. Laser & Optoelectronics Progress, 2013, 50(10): 101101

    [6] Wang Fuguo. Optimization Design of TMT Tertiary Mirror Axial Support[J]. Laser & Optoelectronics Progress, 2013, 50(9): 92202

    Zhao Lei, Gong Yan. Design and Analysis for the High-Precision Lens Support Structure of Objective Lens for Lithography[J]. Acta Optica Sinica, 2012, 32(9): 922001
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