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    Journals >Acta Optica Sinica >Volume 32 >Issue 9 >Page 922001 > Article
    • Acta Optica Sinica
    • Vol. 32, Issue 9, 922001 (2012)
    Design and Analysis for the High-Precision Lens Support Structure of Objective Lens for Lithography
    Zhao Lei* and Gong Yan
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    DOI: 10.3788/aos201232.0922001 Cite this Article Set citation alerts
    Zhao Lei, Gong Yan. Design and Analysis for the High-Precision Lens Support Structure of Objective Lens for Lithography[J]. Acta Optica Sinica, 2012, 32(9): 922001 Copy Citation Text show less
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    Zhao Lei, Gong Yan. Design and Analysis for the High-Precision Lens Support Structure of Objective Lens for Lithography[J]. Acta Optica Sinica, 2012, 32(9): 922001
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