Experimental study on the electron sensitivity of BCMOS sensor influenced by surface passivation film

Kai Qiao; Shengkai Wang; Hongchang Cheng; Chuan Jin; Taimin Zhang; Xiaojun Yang; Bin Ren

doi:10.3788/IRLA202049.0418002

[1] Zhang Jingxian, Li Yudan, Jin Weiqi. Imaging Techneque of LLL Laser[M]. Beijing: Beijing University of Science Technology Press, 1995. (in Chinese)

[2] Weiqi Jin, Yu Tao, Feng Shi. Progress of low light video technology. Infrared and Laser Engineering, 44, 3167-3176(2015).

[3] R Barbier, J Baudot, E Chabant. Performance study of a megapixel single photon position sensitive photodetector EBCMOS. Nuclear Instruments and Methods in Physics Research A, 640, 54-56(2009).

[4] Hulin Liu, Xing Wang, Jinshou Tian. High resolution electron bombareded complementary metal oxide semiconductor sensor for ultraviolet detection. Acta Physica Sinica, 67, 014209(2018).

[5] R Barbier, T Cajgfinger, P Calabria. A single-photon sensitive ebCMOS camera: the LUSIPHER prototype. Nuclear Instruments and Methods in Physics Research A, 648, 266-274(2011).

[6] A Dominjon, M Ageron, R Barbier. A ebCMOS camera system for marine bioluminescence observation: the luSEApher prototype. Nuclear Instruments and Methods in Physics Research A, 695, 172-178(2012).

[7] T Cajgfinger, R Barbier, A Dominjon. Single photon detection and localization accuracy with an ebCMOS camera. Nuclear Instruments and Methods in Physics Research A, 787, 176-181(2015).

[8] De Song, Feng Shi, Ye Li. Simulation of charge collection efficiency for EBAPS with uniformly doped substrate. Infrared and Laser Engineering, 45, 0203002(2016).

[9] Xiang Zhang, Bangwu Liu, Yang Xia. The passivation of Al₂O₃ and its applications in the crystalline silicon solar cell. Acta Physica Sinica, 61, 187303(2012).

[10] Chengcai Yang, Guohao Ju, Yongping Chen. Study on the photo response of a CMOS sensor integrated with PIN photodiodes. Chinese Optics, 12, 1076-1089(2019).