Kai Qiao, Shengkai Wang, Hongchang Cheng, Chuan Jin, Taimin Zhang, Xiaojun Yang, Bin Ren. Experimental study on the electron sensitivity of BCMOS sensor influenced by surface passivation film[J]. Infrared and Laser Engineering, 2020, 49(4): 0418002
- Infrared and Laser Engineering
- Vol. 49, Issue 4, 0418002 (2020)
Fig. 1. System of vacuum electron bombardment test
Fig. 2. Principle of electron multiplication
Fig. 3. Electron bombardment response curve
Fig. 4. Electron bombardment response curve of BCMOS with Al2O3 film of different thickness
Fig. 5. Response energy corresponding to different thin film thickness
Fig. 6. Increasing percentage of the multiplier electron collection efficiency varies with the film thickness
Fig. 7. Effect of energy band distribution on secondary electron collection before and after passivation
Fig. 8. Average dark current of BCMOS sensor under different conditions
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