Design and fabrication of a SiN-Si dual-layer optical phased array chip

Pengfei Wang; Guangzhen Luo; Yang Xu; Yajie Li; Yanmei Su; Jianbin Ma; Ruiting Wang; Zhengxia Yang; Xuliang Zhou; Yejin Zhang; Jiaoqing Pan

doi:10.1364/PRJ.387376

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