Song GENG, Jin YANG, Shu-Jie LI, Gang QIN, Li-Hua LI, Jun ZHAO, Yan-Hui LI, Jin-Cheng KONG, Peng ZHAO, Da-Fan ZUO, Yan-Bo HU, Yan LIANG, Yang REN. Study of MW/LW dual-band IRFPAs detector assemblies[J]. Journal of Infrared and Millimeter Waves, 2023, 42(3): 292
- Journal of Infrared and Millimeter Waves
- Vol. 42, Issue 3, 292 (2023)
Fig. 1. Relationship of medium wave photon absorptivity and absorption layer thickness
Fig. 2. Relationship of long wave quantum efficiency and absorption thickness
Fig. 3. Cross-section schematic of MW/LW two-band HgCdTe infrared detector
Fig. 4. Schematic of the input stage of the dual-band ROIC
Fig. 5. Timing schedule of integration and readout
Fig. 6. SEM characterization of MW/LW dual-band HgCdTe grown by MBE
Fig. 7. Surface morphology of MW/LW dual-band HgCdTe film
Fig. 8. [in Chinese]
Fig. 9. XRD characterization results of MW/LW dual-band HgCdTe film
Fig. 10. The ICP etching effect of the mesa-hole (a) high etching temperature,(b) the ratio of process gas is out of balance,(c)high etching pressure,(d)low etching power,(e)after improvement of the etching process, (f)cross-section schematic of the mesa-hole
Fig. 11. Sidewall passivation effect of the mesa-hole
Fig. 12. The relative spectral response between MW and LW
Fig. 13. Test results of the MW/LW dual-bands HgCdTe FPA (a) response signal map of MW,(b) response signal map of LW
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Table 1. The performance of the dual-band ROIC chip under 77 K
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Table 2. Test results of the MW/LW dual-band FPA
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