• Acta Optica Sinica
  • Vol. 40, Issue 9, 0934001 (2020)
Naxi Tian1、2、3, Hui Jiang1、3、*, Aiguo Li1、3、**, Dongxu Liang1、3, and Shuai Yan1、3
Author Affiliations
  • 1Shanghai Institute of Apply Physics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Department of Advanced Imaging and Industrial Application Research, Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China
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    DOI: 10.3788/AOS202040.0934001 Cite this Article Set citation alerts
    Naxi Tian, Hui Jiang, Aiguo Li, Dongxu Liang, Shuai Yan. Study on Phase Compensation Mirror Used for Hard X-Ray Synchrotron Radiation[J]. Acta Optica Sinica, 2020, 40(9): 0934001 Copy Citation Text show less

    Abstract

    A piezoelectric deformable mirror for phase compensation is designed and fabricated and its piezoelectric properties are ex situ characterized by using the Fizeau interferometer. Moreover, an iterative global optimization algorithm is developed to realize a quick and accurate approach to the target figure. The in situ phase compensation performance of the mirror and its ability to optimize the focusing spot size are verified under the focusing beam mode and with the hard X-ray speckle scanning metrology. The experimental results show that the focal spot size is compressed from 43.4 μm to 12.9 μm after phase compensation. The research here lays a foundation for the realization of rapid phase compensation in the Shanghai Synchrotron Radiation Facility.
    Naxi Tian, Hui Jiang, Aiguo Li, Dongxu Liang, Shuai Yan. Study on Phase Compensation Mirror Used for Hard X-Ray Synchrotron Radiation[J]. Acta Optica Sinica, 2020, 40(9): 0934001
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