• Infrared and Laser Engineering
  • Vol. 50, Issue 6, 20200329 (2021)
Junning Cui1、2, Wei Li1、2、*, Xingyuan Bian1、2, Gang Zhu3, Zhangqiang He1、2, and Limin Zou1、2
Author Affiliations
  • 1Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China
  • 2Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
  • 3Beijing Aerospace Institute for Metrology and Measurement Technology, Beijing 100076, China
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    DOI: 10.3788/IRLA20200329 Cite this Article
    Junning Cui, Wei Li, Xingyuan Bian, Gang Zhu, Zhangqiang He, Limin Zou. Homodyne quadrature laser interferometry measurement method for large amplitude, long cycle vibration calibration[J]. Infrared and Laser Engineering, 2021, 50(6): 20200329 Copy Citation Text show less

    Abstract

    In order to carry out performance testing of ultra-low frequency standard vibration table with large amplitude, an undersampling homodyne quadrature laser interferometry measurement method was proposed in this paper. Based on the design of depolarization beam splitting measurement optical path, a wave plate yaw adjustment method was proposed to compensate hardware of the quadrature phase error in real time. The Kalman quadrature signal demodulation algorithm based on motion state estimation was presented to demodulate the interference fringes of deep undersampling to reduce the sampling rate and the amount of data produced. The experimental and simulation results show that the quadrature phase error and its sensitivity to the angle deviations of wave plates are significantly reduced, the sampling rate of the Kalman quadrature signal demodulation algorithm and number of samples per channel are reduced to 0.056% of Nyquist sampling theorem for measuring ultra-low frequency vibration. The undersampling homodyne quadrature laser interferometry measurement method proposed in this paper can meet the requirements of ultra low frequency and ultra large amplitude standard vibration measurement.
    Junning Cui, Wei Li, Xingyuan Bian, Gang Zhu, Zhangqiang He, Limin Zou. Homodyne quadrature laser interferometry measurement method for large amplitude, long cycle vibration calibration[J]. Infrared and Laser Engineering, 2021, 50(6): 20200329
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