• Acta Photonica Sinica
  • Vol. 49, Issue 6, 0612001 (2020)
Fang WANG1, Qing-jie LU1, Jin-cheng ZHUANG2, Quan-zhao WANG3, and Sen HAN1、4、*
Author Affiliations
  • 1School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 2Suzhou University of Science and Technology, Suzhou, Jiangsu 215009, China
  • 3Suzhou W & N Instruments LLC, Suzhou, Jiangsu 215123, China
  • 4Suzhou H & L Instruments LLC, Suzhou, Jiangsu 215123, China
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    DOI: 10.3788/gzxb20204906.0612001 Cite this Article
    Fang WANG, Qing-jie LU, Jin-cheng ZHUANG, Quan-zhao WANG, Sen HAN. Morphology Detection of Optical Components Based on Hysteresis Nonlinear Compensation System[J]. Acta Photonica Sinica, 2020, 49(6): 0612001 Copy Citation Text show less
    References

    [1] TANG S H. Nonlinear phase shift calibration f interferometric measurement of multiple surfaces: US, 6856405 B2[P]. 20050215.http:www.freepatentsonline.com6856405.html

    [2] E P GOODWIN, J C WYANT. Field guide to interferometric optical testing(2006).

    [5] C H RU, L N SUN. A new open-loop driving method of piezoelectric actuator for periodic reference inputs. Ultrasonics, 44, e633-e637(2006).

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    [10] S H LEE, T J ROYSTON, G FRIEDMAN. Modeling and compensation of hysteresis in piezoceramic transducers for vibration control. Journal of Intelligent Material Systems and Structures, 11, 781-790(2000).

    [11] D HABINEZA, M RAKOTONDRABE, Y GORREC. Bouc-Wen modeling and feedforward control of multivariable hysteresis in piezoelectric systems:Application to a 3-Do F piezo tube scanner. IEEE Transactions on Control Systems Technology, 23, 1797-1806(2015).

    [12] A J MOHAMMAD, R MICKY, A OMAR. Further results on hysteresis compensation of smart micropositioning systems with the inverse Prandtl-ishlinskii compensator. IEEE Transactions on Control System Technology, 24, 428-439(2016).

    [13] D MALACARA. Optical shop testing(2007).

    Fang WANG, Qing-jie LU, Jin-cheng ZHUANG, Quan-zhao WANG, Sen HAN. Morphology Detection of Optical Components Based on Hysteresis Nonlinear Compensation System[J]. Acta Photonica Sinica, 2020, 49(6): 0612001
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