• Acta Photonica Sinica
  • Vol. 49, Issue 6, 0612001 (2020)
Fang WANG1, Qing-jie LU1, Jin-cheng ZHUANG2, Quan-zhao WANG3, and Sen HAN1、4、*
Author Affiliations
  • 1School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 2Suzhou University of Science and Technology, Suzhou, Jiangsu 215009, China
  • 3Suzhou W & N Instruments LLC, Suzhou, Jiangsu 215123, China
  • 4Suzhou H & L Instruments LLC, Suzhou, Jiangsu 215123, China
  • show less
    DOI: 10.3788/gzxb20204906.0612001 Cite this Article
    Fang WANG, Qing-jie LU, Jin-cheng ZHUANG, Quan-zhao WANG, Sen HAN. Morphology Detection of Optical Components Based on Hysteresis Nonlinear Compensation System[J]. Acta Photonica Sinica, 2020, 49(6): 0612001 Copy Citation Text show less


    In order to reduce the error of phase calculation caused by the hysteresis nonlinear of piezoelectric ceramic actuator in phase-shifting interferometer, a control system for a piezoelectric ceramic actuator is designed. The high precision resistance strain sensor and signal conditioning circuit based on the principle of phase-locked amplification are used to detect the displacement of the piezoelectric ceramic actuator. A polynomial mathematical model is established to describe the hysteresis nonlinearity. And then, a feed-forward open-loop control method is proposed to compensate for the hysteresis nonlinearity. Finally, based on the proposed scheme, a tracking control experiment of the desired trajectory of the piezoelectric ceramic actuator is performed. At the same time, a compensation control system and an interferometer are used to detect the surface morphology of the optical element. The experimental results show that after compensation, the tracking error of the piezoelectric ceramic actuator is between -0.156 μm and +0.078 μm, and the hysteresis nonlinearity is reduced from 10.4% to 2.4%, and the surface shape undulated height Root Mean Square (RMS) and Peak Valley (PV) of the optical element measured by the interferometer are changed by 0.795 nm and 3.937 nm respectively. It shows that this system is of great significance for the high-precision shape detection of optical components.