Fang WANG, Qing-jie LU, Jin-cheng ZHUANG, Quan-zhao WANG, Sen HAN. Morphology Detection of Optical Components Based on Hysteresis Nonlinear Compensation System[J]. Acta Photonica Sinica, 2020, 49(6): 0612001
- Acta Photonica Sinica
- Vol. 49, Issue 6, 0612001 (2020)
Fig. 1. The interferometry system based on compensation control
Fig. 2. Block diagram of hysteresis nonlinear compensation control system for piezoelectric ceramic actuator
Fig. 3. The principle of phase-locked amplifier
Fig. 4. Hysteresis of Piezoelectric ceramic actuator
Fig. 5. Feedforward open-loop control based on piezoelectric ceramic actuator transfer function
Fig. 6. Feasibility verification of phase-locked amplifier
Fig. 7. Error of simulation and experimental data of phase-locked amplifier
Fig. 8. Periodic triangular wave control signal
Fig. 9. Displacement signal
Fig. 10. Tracking control with hysteresis nonlinear compensated
Fig. 11. The hysteresis nonlinear of piezoelectric ceramic actuator displacement with compensated and without compensated
Fig. 12. The surface morphology of the samples measured by the interferometer without and with compensated
Fig. 13. Continuous measurement results under compensation control
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