Studies on the Preparation and Properties of Nanocrystalline ZnSX Thin Films by RF Magnetron Sputtering Technique at Room Temperature

Yang YANG; Gang LI; Kewu JING; Tianqi WANG; Saiao PENG; Tingting YAO; Shuyong CHEN

doi:10.3788/gzxb20215007.0731002

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