Yang YANG, Gang LI, Kewu JING, Tianqi WANG, Saiao PENG, Tingting YAO, Shuyong CHEN. Studies on the Preparation and Properties of Nanocrystalline ZnSX Thin Films by RF Magnetron Sputtering Technique at Room Temperature[J]. Acta Photonica Sinica, 2021, 50(7): 230
- Acta Photonica Sinica
- Vol. 50, Issue 7, 230 (2021)
Fig. 1. XRD patterns of ZnSX thin films at various sputtering powers
Fig. 2. SEM images of ZnSX thin films at various sputtering powers
Fig. 3. Micro-Raman spectra of ZnSX thin films at various sputtering powers
Fig. 4. Transmittance of ZnSX thin films at various sputtering powers
Fig. 5. （αhv ）2-hv relationship curves of ZnSX thin films at various sputtering powers
Fig. 6. Fit results of Ψ of ZnSX film by Cauchy mode
Fig. 7. Fit results of Δ of ZnSX film by Cauchy model
Fig. 8. Refractive index of ZnSX thin films at various sputtering powers
Fig. 9. Extinction coefficient of ZnSX thin films at various sputtering powers
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Table 1. Crystal parameters at different sputtering powers
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Table 2. EDX elemental analysis of ZnSX thin films at different sputtering powers
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