Guodong Liu, Binghui Lu, Heyi Sun, Bingguo Liu, Fengdong Chen, Zhitao Zhuang. Improved phase-shifting diffraction interferometer for microsphere topography measurements[J]. Chinese Optics Letters, 2016, 14(7): 071202
- Chinese Optics Letters
- Vol. 14, Issue 7, 071202 (2016)
Fig. 1. Diagram of the PSDI.
Fig. 2. Diffraction self-calibration.
Fig. 3. Experimental setup.
Fig. 4. Calibrated systematic errors.
Fig. 5. Interference pattern and signal.
Fig. 6. Measured topographical errors.
|
Table 1. Measured Result Comparison.
|
Table 2. PV, Rq, and Ra of Five Testing Locations.
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20