• Chinese Optics Letters
  • Vol. 14, Issue 7, 071202 (2016)
Guodong Liu, Binghui Lu, Heyi Sun, Bingguo Liu*, Fengdong Chen, and Zhitao Zhuang
Author Affiliations
  • Instrument Science and Technology, Harbin Institute of Technology, Harbin 150001, China
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    DOI: 10.3788/COL201614.071202 Cite this Article Set citation alerts
    Guodong Liu, Binghui Lu, Heyi Sun, Bingguo Liu, Fengdong Chen, Zhitao Zhuang. Improved phase-shifting diffraction interferometer for microsphere topography measurements[J]. Chinese Optics Letters, 2016, 14(7): 071202 Copy Citation Text show less

    Abstract

    In this study, an improved phase-shifting diffraction interferometer for measuring the surface topography of a microsphere is developed. A common diode-pumped solid state laser is used as the light source to facilitate apparatus realization, and a new polarized optical arrangement is designed to filter the bias light for phase-shifting control. A pinhole diffraction self-calibration method is proposed to eliminate systematic errors introduced by optical elements. The system has an adjustable signal contrast and is suitable for testing the surface with low reflectivity. Finally, a spherical ruby probe of a coordinate measuring machine is used as an example tested by the new phase-shifting diffraction interferometer system and the WYKO scanning white light interferometer for experimental comparison. The measured region presents consistent overall topography features, and the resulting peak-to-valley value of 84.43 nm and RMS value of 18.41 nm are achieved. The average roughness coincides with the manufacturer’s specification value.
    {ET=[cosθsinθ]ER=[sinθcosθ],(1)

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    {ETR=[0001]EA·[1ii1]EQ·[reiΔ00reiΔ]EΔ·[1ii1]EQ·[10]ET=2reiΔ[01]ETD=[0001]EA·[10]ET=0ERR=[0001]EA·[1ii1]EQ·[reiΔ00reiΔ]EΔ·[1ii1]EQ·[01]ER=0ERD=[0001]EA·[01]ER=[01],(2)

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    W=2·(WMO+WQWP+WL2)+WORA+WΔ,(3)

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    W*=WMO+WQWP+WL2+WORA,(4)

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    WΔ=W2W*+WORA.(5)

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    Guodong Liu, Binghui Lu, Heyi Sun, Bingguo Liu, Fengdong Chen, Zhitao Zhuang. Improved phase-shifting diffraction interferometer for microsphere topography measurements[J]. Chinese Optics Letters, 2016, 14(7): 071202
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