• Chinese Optics Letters
  • Vol. 14, Issue 7, 070401 (2016)
Bingxin Kang, Yi Cai, and Lingxue Wang*
Author Affiliations
  • School of Optoelectronics, Beijing Institute of Technology, Key Laboratory of Photoelectronic Imaging Technology and Systems, Beijing Engineering Research Centre for Mixed Reality and Advanced Display Technology, Beijing 100081, China
  • show less
    DOI: 10.3788/COL201614.070401 Cite this Article Set citation alerts
    Bingxin Kang, Yi Cai, Lingxue Wang. External quantum efficiency-enhanced PtSi Schottky-barrier detector utilizing plasmonic ZnO:Al nanoparticles and subwavelength gratings[J]. Chinese Optics Letters, 2016, 14(7): 070401 Copy Citation Text show less
    Schematic of (a) proposed and (b) conventional PtSi SBD structure.
    Fig. 1. Schematic of (a) proposed and (b) conventional PtSi SBD structure.
    (a) Real and (b) imaginary components of complex permittivity of ZnO:Al material with different electron concentrations.
    Fig. 2. (a) Real and (b) imaginary components of complex permittivity of ZnO:Al material with different electron concentrations.
    Quality factors versus wavelength for ZnO:Al, silver, and gold materials. Inset of the figure shows the εi of ZnO:Al, silver, and gold materials. Note: ZnO:Al can exhibit absorption losses tens or hundreds of times lower than those of silver and gold.
    Fig. 3. Quality factors versus wavelength for ZnO:Al, silver, and gold materials. Inset of the figure shows the εi of ZnO:Al, silver, and gold materials. Note: ZnO:Al can exhibit absorption losses tens or hundreds of times lower than those of silver and gold.
    Absorption efficiency for (a) different ZnO:Al nanoparticle radii r with the distance between the nanoparticles and the PtSi layer p=0.4 μm, and for (b) different p with r=0.65 μm.
    Fig. 4. Absorption efficiency for (a) different ZnO:Al nanoparticle radii r with the distance between the nanoparticles and the PtSi layer p=0.4μm, and for (b) different p with r=0.65μm.
    Simulated electric field distributions around nanoparticles at the two peak wavelengths of (a) 3.5 and (b) 4.6 μm in Fig. 4(a), with r=0.65 μm and p=0.4 μm, respectively.
    Fig. 5. Simulated electric field distributions around nanoparticles at the two peak wavelengths of (a) 3.5 and (b) 4.6 μm in Fig. 4(a), with r=0.65μm and p=0.4μm, respectively.
    Absorption efficiencies of conventional SBD structures with and without nanoparticles, and that of the proposed structure.
    Fig. 6. Absorption efficiencies of conventional SBD structures with and without nanoparticles, and that of the proposed structure.
    Theoretical EQE by our proposed structure compared to the conventional structure. The EQEs of the measurements from the literature and the theoretical limit (A(λ)=1) are also shown.
    Fig. 7. Theoretical EQE by our proposed structure compared to the conventional structure. The EQEs of the measurements from the literature and the theoretical limit (A(λ)=1) are also shown.
    ParametersSymbolValue (μm)ParametersSymbolValue (μm)
    PtSi film thicknesst0.003Thickness of SiO2 subwavelength gratingd0.4
    p-type Si thicknessl2Subwavelength-grating fill factorf0.5
    SiO2 AR film thickness for conventional PtSi detectorD0.6ZnO:Al nanoparticle pitchs1.5
    Subwavelength-grating periodΛ3ZnO:Al nanoparticle radiusr0.65
    Subwavelength-grating groove depthh0.5Distance between nanoparticle and PtSi layerp0.4
    Table 1. Optimized Parameters for Simulating Proposed PtSi SBD Structure Performance.
    Bingxin Kang, Yi Cai, Lingxue Wang. External quantum efficiency-enhanced PtSi Schottky-barrier detector utilizing plasmonic ZnO:Al nanoparticles and subwavelength gratings[J]. Chinese Optics Letters, 2016, 14(7): 070401
    Download Citation