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    Journals >Acta Optica Sinica >Volume 8 >Issue 10 >Page 928 > Article
    • Acta Optica Sinica
    • Vol. 8, Issue 10, 928 (1988)
    A submicron lithographic lens available to 1:1 stepper
    WANG ZHIJIANG, SUN BAODING, Lu DENGWU, and JIANG JIANZHONG
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    WANG ZHIJIANG, SUN BAODING, Lu DENGWU, JIANG JIANZHONG. A submicron lithographic lens available to 1:1 stepper[J]. Acta Optica Sinica, 1988, 8(10): 928 Copy Citation Text show less
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    WANG ZHIJIANG, SUN BAODING, Lu DENGWU, JIANG JIANZHONG. A submicron lithographic lens available to 1:1 stepper[J]. Acta Optica Sinica, 1988, 8(10): 928
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