• Acta Optica Sinica
  • Vol. 8, Issue 10, 928 (1988)
WANG ZHIJIANG, SUN BAODING, Lu DENGWU, and JIANG JIANZHONG
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  • [in Chinese]
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    WANG ZHIJIANG, SUN BAODING, Lu DENGWU, JIANG JIANZHONG. A submicron lithographic lens available to 1:1 stepper[J]. Acta Optica Sinica, 1988, 8(10): 928 Copy Citation Text show less

    Abstract

    The optical design and model experiment results of a lithographic lens available to 1:1 stepper -with a numerical aperture of 0.4 and field size of 10×10mm2 are degoribed. The optical design is based on Wynne-Dyson s 1:1 oatadioptrio system and some modifications have been made. The experimental results have shown that the lens possesses submicron lithographic resolution.
    WANG ZHIJIANG, SUN BAODING, Lu DENGWU, JIANG JIANZHONG. A submicron lithographic lens available to 1:1 stepper[J]. Acta Optica Sinica, 1988, 8(10): 928
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