WANG ZHIJIANG, SUN BAODING, Lu DENGWU, JIANG JIANZHONG. A submicron lithographic lens available to 1:1 stepper[J]. Acta Optica Sinica, 1988, 8(10): 928

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- Acta Optica Sinica
- Vol. 8, Issue 10, 928 (1988)
Abstract

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