Fast Fabrication of Large-Area Two-Dimensional Micro/Nanostructure by Femtosecond Laser

Wen Gao; Meiling Zheng; Feng Jin; Xianzi Dong; Jie Liu

doi:10.3788/LOP57.111421

[1] Jiang X Y, Gao H F, Zhang X Q et al. Highly-sensitive optical organic vapor sensor through polymeric swelling induced variation of fluorescent intensity[J]. Nature Communications, 9, 3799(2018).

[2] Li L, Wang Q G. Thermoelectricity in heterogeneous nanofluidic channels[J]. Small, 14, 1800369(2018).

[3] Fontana M, Fijen C, Lemay S G et al. High-throughput, non-equilibrium studies of single biomolecules using glass-made nanofluidic devices[J]. Lab on a Chip, 19, 79-86(2019).

[4] Chuang Y J, Tseng F G, Lin W K. Reduction of diffraction effect of UV exposure on SU-8 negative thick photoresist by air gap elimination[J]. Microsystem Technologies, 8, 308-313(2002).

[5] Malloy M. Technology review and assessment of nanoimprint lithography for semiconductor and patterned media manufacturing[J]. Journal of Micro/Nanolithography MEMS and MOEMS, 10, 032001(2011).

[6] Xing J F, Zheng M L, Duan X M. Two-photon polymerization microfabrication of hydrogels: an advanced 3D printing technology for tissue engineering and drug delivery[J]. Chemical Society Reviews, 44, 5031-5039(2015).

[7] Sun S M, Sun Y L, Liu D X et al. Protein functional devices manufactured by femtosecond laser direct writing[J]. Laser & Optoelectronics Progress, 50, 080003(2013).

[8] Zhao Q Z, Qiu J R, Jiang X W et al. Direct writing computer-generated holograms on metal film by an infrared femtosecond laser[J]. Optics Express, 13, 2089-2092(2005).

[9] Manfrinato V R, Zhang L H, Su D et al. Resolution limits of electron-beam lithography toward the atomic scale[J]. Nano Letters, 13, 1555-1558(2013).

[10] Yan W, Hu S, Tang X P et al. The method and equipment of maskless step digital lithography based on DMD[J]. Equipment for Electronic Products Manufacturing, 37, 14-19(2008).

[11] Liu Y H, Zhao Y Y, Dong X Z et al. Limit resolution of digital mask projection lithography[J]. Chinese Journal of Quantum Electronics, 36, 354-359(2019).

[12] Sohn I B. Direct femtosecond laser lithography for photoresist patterning[J]. Optical Engineering, 48, 024301(2009).

[13] Cao H Z, Zheng M L, Dong X Z et al. Two-photon nanolithography of positive photoresist thin film with ultrafast laser directwriting[J]. Applied Physics Letters, 102, 201108(2013).

[14] Zheng Y C, Zhao Y Y, Zheng M L et al. Cucurbit[7]uril-carbazole two-photon photoinitiators for the fabrication of biocompatible three-dimensional hydrogel scaffolds by laser direct writing in aqueous solutions[J]. ACS Applied Materials & Interfaces, 11, 1782-1789(2019).

[15] Wei S X, Liu J, Zhao Y Y et al. Protein-based 3D microstructures with controllable morphology and pH-responsive properties[J]. ACS Applied Materials & Interfaces, 9, 42247-42257(2017).

[16] Zhu J P, Hu S, Yu J S et al. A graphic matching method for digital micromirror device maskless photolithography[J]. Chinese Journal of Lasers, 39, 0616002(2012).