• Acta Optica Sinica
  • Vol. 37, Issue 1, 122001 (2017)
Zong Yonghong1、2、*, Zhou Changhe1, Ma Jianyong1, Wang Jin1, and Lu Yancong1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    DOI: 10.3788/aos201737.0122001 Cite this Article Set citation alerts
    Zong Yonghong, Zhou Changhe, Ma Jianyong, Wang Jin, Lu Yancong. Optimized Design of Leveling and Focusing Servo Control System[J]. Acta Optica Sinica, 2017, 37(1): 122001 Copy Citation Text show less
    References

    [1] Ren Yantong, Fu Yongqi. The diffraction optical element technology and the future outlook[J]. Optics and Precision Engineering, 1997, 5(2): 7-11.

    [3] Jin Zhanlei, Tan Jiubi, Zhang Shan. Research of linewidth stabilizing method during defocusing laser direct writing[J]. Acta Optica Sinica, 2008, 28(9): 1730-1734.

    [4] Gale M T, Rossi M. Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists[J]. Optical Engineering, 1994, 33(11): 3556-3566.

    [5] Korolkov V P, Malyshev A I. Application of gray-scale LDW-glass masks for fabrication of high-efficiency DOEs[C]. SPIE, 1999, 3633: 129-138.

    [6] Huang P S, Kiyono S, Kamada O. Angle measurement based on the internal reflection effect: a new method[J]. Applied Optics, 1992, 31(28): 6047-6055.

    [7] Xia Yiqun. Study on differential astigmatism focus detection system[D]. Harbin: Harbin Institute of Technology, 2001: 41-48.

    [8] Huang P S, Ni J. Angle measurement based on the internal reflection effect using elongated critical-angle prisms[J]. Applied Optics, 1996, 35(13): 2239-2241.

    [9] Udupa G, Singaperumal M, Sirohi R S, et al. Characterization of surface topography by confocal microscopy: I. principles and the measurement system[J]. Measurement Science & Technology, 2000, 11(3): 305-314.

    [10] He Fengtao, Bai Yonglin, Feng Xiaoqiang, et al. The real-time measurement of astigmatic principle on micro displacement and micro vibration[J]. Acta Photonica Sinica, 2003, 32(10): 1208-1209.

    [11] Qiang X F. Electric instrument for geometric measurement[M]. Beijing: Mechanical Engineering Press, 1981: 38-41.

    [12] Tsuguo K. High precision optical surface sensor[J]. Applied Optics, 1988, 27(1): 103-108.

    [13] Kohno T, Ozawa N, Miyamoto K, et al. Pratical non-contact surface measuring instrument with one nanometre resolution[J]. Precision Engineering, 1985, 7(4): 231-232.

    [14] Pan Ping. Study on differential astigmatism detection technology[D]. Harbin: Harbin Institute of Technology, 2010: 8-10.

    [15] Wang Dongfang. An monitoring experimental facility based on one-way defocus differential astigmatic principle[D]. Harbin: Harbin Institute of Technology, 2006: 14-17.

    [16] Moharam M, Gaylord T K. Diffraction analysis of dielectric surface-relief gratings[J]. Journal of the Optical Society of America, 1982, 72(10): 187-192.

    [17] Zheng J, Zhou Chang he. Beam splitting of low-contrast binary gratings under second Bragg angle incidence[J]. JOSA A, 2008, 25(5): 1075-1083.

    [18] Liao Feihong, Li Xiaoping, Chen Xuedong, et al. Probe spot position error on the accuracy of focusing and leveling measurement system[J]. Acta Optica Sinica, 2010, 30(4): 1041-1045.

    [19] Sun Yuwen, Li Shiguang, Ye Tianchun, et al. Process dependency of focusing and leveling measurement system in nanoscale lithography[J]. Acta Optica Sinica, 2016, 36(8): 812001.

    [21] Brown A J C. Rapid optical measurement of surfaces[J]. International Journal of Machine Tools & Manufacture, 1995, 35(2): 135-139.

    [22] Zhu Feng. Parallel direct-laser-writing lithography based on Dammann grating[D]. Shanghai: Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, 2014: 24-41.

    Zong Yonghong, Zhou Changhe, Ma Jianyong, Wang Jin, Lu Yancong. Optimized Design of Leveling and Focusing Servo Control System[J]. Acta Optica Sinica, 2017, 37(1): 122001
    Download Citation