• Acta Optica Sinica
  • Vol. 37, Issue 1, 122001 (2017)
Zong Yonghong1、2、*, Zhou Changhe1, Ma Jianyong1, Wang Jin1, and Lu Yancong1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201737.0122001 Cite this Article Set citation alerts
    Zong Yonghong, Zhou Changhe, Ma Jianyong, Wang Jin, Lu Yancong. Optimized Design of Leveling and Focusing Servo Control System[J]. Acta Optica Sinica, 2017, 37(1): 122001 Copy Citation Text show less

    Abstract

    A leveling and focusing servo control system is built to improve the focus accuracy of the differential parallel confocal laser direct writing system. To obtain a detection curve with high sensitivity, accuracy and stability, the cylindrical lens as an astigmatism element is combined with four-quadrant photodetector, and the differential astigmatism detection method and proportion integration differentiation(PID) feedback algorithms are employed to reduce errors caused by light source and external interference. By optimizing the optical parameters, the detection curve with high sensitivity and stability has been obtained, with a range of around 3 μm and a static focusing error of ±5.0 nm. The stretching of piezoelectric ceramic transducer(PZT) can be guaranteed within the depth of focus range in the dynamic mode. Nano-scale precision of the focal position can be achieved, and the tilt and pitch of lever adjuster approximate 0.01 mrad. Utilizing this system, gratings can be fabricated, and this system can provide reference for the fabrication of larger-size and higher-density gratings in the future.
    Zong Yonghong, Zhou Changhe, Ma Jianyong, Wang Jin, Lu Yancong. Optimized Design of Leveling and Focusing Servo Control System[J]. Acta Optica Sinica, 2017, 37(1): 122001
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