[1] Vlasov Y, McNab S. Losses in single-mode silicon-on-insulator strip waveguides and bends. Optics Express, 12, 1622-1631(2004).
[2] Liu X, Wang Z L. Refractive index sensor based on trapezoidal dielectric grating and metallic film structure. Laser & Optoelectronics Progress, 56, 072401(2019).
[3] Han S, Park J, Yoo S et al. Lateral silicon photonic grating-to-fiber coupling with angle-polished silica waveguide blocks. Optics Express, 28, 8811-8818(2020).
[4] van Laere F, Roelkens G, Ayre M et al. Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides. Journal of Lightwave Technology, 25, 151-156(2007).
[5] Nauriyal J, Song M, Yu R et al. Fiber-to-chip fusion splicing for low-loss photonic packaging. Optica, 6, 549-552(2019).
[6] Lukas Chrostowski M H. Silicon photonics design： from devices to systems(2015).
[7] Marchetti R, Lacava C, Carroll L et al. Coupling strategies for silicon photonics integrated chips. Photonics Research, 7, 201-239(2019).
[8] Bozzola A, Carroll L, Gerace D et al. Optimising apodized grating couplers in a pure SOI platform to -0.5 dB coupling efficiency. Optics Express, 23, 16289-16304(2015).
[9] Saha T K, Zhou W D. High efficiency diffractive grating coupler based on transferred silicon nanomembrane overlay on photonic waveguide. Journal of Physics D： Applied Physics, 42, 085115(2009).
[10] Tang Y, Wang Z, Wosinski L et al. Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits. Optics Letters, 35, 1290-1292(2010).
[11] Li C, Zhang H J, Yu M B et al. CMOS-compatible high efficiency double-etched apodized waveguide grating coupler. Optics Express, 21, 7868-7874(2013).
[12] Benedikovic D, Cheben P, Schmid J H et al. High-efficiency single etch step apodized surface grating coupler using subwavelength structure. Laser & Photonics Reviews, 8, L93-L97(2014).
[13] Marchetti R, Lacava C, Khokhar A et al. High-efficiency grating-couplers： demonstration of a new design strategy. Scientific Reports, 7, 16670(2017).
[14] Mao Q, Tang X G, Meng F et al. Tunable narrow-band filter with sub-wavelength grating structure by micro-optofluidic technique. Laser & Optoelectronics Progress, 56, 042301(2019).
[15] Michael Miller J, de Beaucoudrey N, Chavel P et al. Design and fabrication of binary slanted surface-relief gratings for a planar optical interconnection. Applied Optics, 36, 5717-5727(1997).
[16] Taillaert D, Bogaerts W, Bienstman P et al. An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers. IEEE Journal of Quantum Electronics, 38, 949-955(2002).
[17] Taillaert D, Bienstman P, Baets R. Compact efficient broadband grating coupler for silicon-on-insulator waveguides. Optics Letters, 29, 2749-2751(2004).
[18] Son G, Han S, Park J et al. High-efficiency broadband light coupling between optical fibers and photonic integrated circuits. Nanophotonics, 7, 1845-1864(2018).
[19] Yang J M, Lin Y L, Huang Q Q et al. Wavelength-tunable linearly polarized Yb-doped fiber laser based on tilted fiber grating. Acta Optica Sinica, 40, 0314003(2020).
[21] Li M, Sheard S. Experimental study of waveguide grating couplers with parallelogramic tooth profiles. Optical Engineering, 35, 3101-3106(1996).
[22] Levola T, Laakkonen P. Replicated slanted gratings with a high refractive index material for in and outcoupling of light. Optics Express, 15, 2067-2074(2007).
[23] Wang B, Jiang J H, Nordin G. Compact slanted grating couplers. Optics Express, 12, 3313-3326(2004).
[24] Wang B, Jiang J H, Nordin G P. Embedded slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguides. IEEE Photonics Technology Letters, 17, 1884-1886(2005).
[25] van Laere F, Kotlyar M V, Taillaert D et al. Compact slanted grating couplers between optical fiber and InP-InGaAsP waveguides. IEEE Photonics Technology Letters, 19, 396-398(2007).
[26] Schrauwen J, Laere F V, Thourhout D V et al. Focused-ion-beam fabrication of slanted grating couplers in silicon-on-insulator waveguides. IEEE Photonics Technology Letters, 19, 816-818(2007).
[27] Guenther B D. Modern Optics, 56-57(2016).
[28] Aoyagi T, Aoyagi Y, Namba S. High-efficiency blazed grating couplers. Applied Physics Letters, 29, 303-304(1976).
[29] Liu Q, Wu J H, Guo P L et al. Fabrication of convex blazed grating with high diffraction efficiency. Chinese Journal of Lasers, 46, 0313001(2019).
[30] Zhang B Q, Wang Q H, Shen N G et al. Experimental investigation and numerical analysis of mechanical ruling for an aluminum-coated diffraction grating. Journal of Manufacturing Science and Engineering, 139, 021003(2017).
[31] Shi J, Sheng B, Huang Y S et al. Multifacet echelle grating for intensity broadening on spectral plane fabricated by rotating ion-beam etching. Applied Optics, 58, 5040-5044(2019).
[32] Voronov D L, Ahn M, Anderson E H et al. High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths. Optics Letters, 35, 2615-2617(2010).
[33] Ang M T W, Reed G T, Vonsovici A P et al. Blazed-grating couplers in unibond SOI. Proceedings of SPIE, 3896, 360-368(1999).
[34] Ang T W, Reed G T, Vonsovici A et al. Highly efficient unibond silicon-on-insulator blazed grating couplers. Applied Physics Letters, 77, 4214-4216(2000).
[35] Cheng Y. The design and fabrication of convex blazed grating with small blaze angle(2014).
[36] Mattelin M A, Radosavljevic A, Missinne J et al. Design and fabrication of blazed gratings for a waveguide-type head mounted display. Optics Express, 28, 11175-11190(2020).
[37] Zheng Z Z, Yang Z, Xiu L C. Development and application of shortwave infrared convex blazed grating with high diffraction efficiency. Acta Optica Sinica, 40, 1205002(2020).
[38] Salik M D, Chavel P. Resonant excitation analysis of waveguide grating couplers. Optics Communications, 193, 127-131(2001).
[39] Lalanne P, Astilean S, Chavel P et al. Design and fabrication of blazed binary diffractive elements with sampling periods smaller than the structural cutoff. Journal of the Optical Society of America A, 16, 1143-1156(1999).
[40] Haidner H, Sheridan J T, Streibl N. Dielectric binary blazed gratings. Applied Optics, 32, 4276-4278(1993).
[41] Lalanne P. Waveguiding in blazed-binary diffractive elements. Journal of the Optical Society of America A, 16, 2517-2520(1999).
[42] Sandfuchs O, Brunner R, Pätz D et al. Rigorous analysis of shadowing effects in blazed transmission gratings. Optics Letters, 31, 3638-3640(2006).
[43] Yu L, Liu L, Zhou Z P et al. High efficiency binary blazed grating coupler for perfectly-vertical and near-vertical coupling in chip level optical interconnections. Optics Communications, 355, 161-166(2015).
[44] Zhou W, Yang J B, Zhang H L et al. Design of high-efficiency fully-etched binary blazed gratings nearly vertical coupler. IEEE Photonics Technology Letters, 24, 1048-1050(2012).
[45] Li H, Liu Y, Miao C et al. High-performance binary blazed grating coupler used in silicon-based hybrid photodetector integration. Optical Engineering, 53, 097106(2014).
[46] Jiang H. Research on silicon based vertical couplers with micro/nano binary blazed gratings(2011).
[47] Yang J B, Zhou Z P, Jia H H et al. High-performance and compact binary blazed grating coupler based on an asymmetric subgrating structure and vertical coupling. Optics Letters, 36, 2614-2617(2011).
[48] Zhou Z, Yu L. Silicon photonic devices based on binary blazed gratings. Optical Engineering, 52, 091708(2013).
[49] Feng J B, Zhou Z P. High efficiency compact grating coupler for integrated optical circuits. Proceedings of SPIE, 6351, 63511H(2006).
[50] Liu L, Zhang J H, Zhang C Z et al. Silicon waveguide grating coupler for perfectly vertical fiber based on a tilted membrane structure. Optics Letters, 41, 820-823(2016).
[51] Laakkonen P, Siitonen S, Kuittinen M. Double-groove， two-depth grating coupler for light guides. Journal of the Optical Society of America A, 23, 3156-3161(2006).
[52] Lütolf F, Stalder M, Martin O J F. Up-scalable method to amplify the diffraction efficiency of simple gratings. Optics Letters, 39, 6557-6560(2014).
[53] Laere F V, Claes T, Schrauwen J et al. Compact focusing grating couplers for silicon-on-insulator integrated circuits. IEEE Photonics Technology Letters, 19, 1919-1921(2007).
