Fig. 1. Schematic diagram of nodule structure.

Fig. 2. Angle-dependent transmission curve.

Fig. 3. (a) FDTD-simulated |E²| distributions for the nodule. (b) |E²| along the coating without the nodule.

Fig. 4. Damage state can be qualitatively described. (a) At low energy, rupture occurs on the side of the nodule that contacts the laser first. (b) Damage occurs at the place where the electric field is enhanced inside the nodule. (c) Modification of the film appears around the nodule. It is observed as a bright spot under a Nomarski microscope, which is the blister of film. (d) Large-scale catastrophic damage centered on the nodule.

Fig. 5. LIDT results of each sample for R-on-1 process.

Fig. 6. R-on-1 process mainly includes five states. 0. Initial nodule. 1. Rupture occurs on the nodule surface. This condition is observed as a change in scattered light under an online microscope. 2. A slight blister appears in the region of the light spot with the nodule as the center, and the height is approximately 30-50 nm. 3. The blister becomes serious, and its height reaches the micron level. 4. Limited growth on the surface near the nodule accompanied by the expansion of the blister area. 5. Growth to the inner layer.

Fig. 7. (a) FDTD-simulated |E²| distribution for the nodule. (b) Electric field distribution along the coating. (c) FIB profile of state 1. (d) FIB profile of state 2.

Table 1. Incidence Angle Range of Different Size Nodules

Table 2. Measured LIDTs of Different Size Nodules and HR Film at States 2 to 4

Table 3. Measured LIDTs of the 2 µm Seed Nodules and the HR Film for the Second Type of Film