Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices

Weiping Zhou; Shi Bai; Zuwu Xie; Mingwei Liu; Anming Hu

doi:10.12086/oee.2022.210330

Journals >Opto-Electronic Engineering >Volume 49 >Issue 1 >Page 210330-1 > Article

Opto-Electronic Engineering
Vol. 49, Issue 1, 210330-1 (2022)

Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices

Weiping Zhou^1、*, Shi Bai², Zuwu Xie¹, Mingwei Liu¹, and Anming Hu³

Author Affiliations

¹Key Laboratory of Intelligent Sensors and Advanced Sensing Materials of Hunan Province, School of Physics and Electronic Science, Hunan University of Science and Technology, Xiangtan, Hunan 411201, China

²Advanced Laser Processing Research Team, RIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan

³Advanced Manufacturing & NanoEngineering Lab, 578 Violet Street, Waterloo, ON N2V 2V6, Canada

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DOI: 10.12086/oee.2022.210330 Cite this Article

Weiping Zhou, Shi Bai, Zuwu Xie, Mingwei Liu, Anming Hu. Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices[J]. Opto-Electronic Engineering, 2022, 49(1): 210330-1 Copy Citation Text

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