Weiping Zhou, Shi Bai, Zuwu Xie, Mingwei Liu, Anming Hu. Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices[J]. Opto-Electronic Engineering, 2022, 49(1): 210330-1
- Opto-Electronic Engineering
- Vol. 49, Issue 1, 210330-1 (2022)
Fig. 1. Schematic diagram of laser direct writing processing system
Fig. 2. Schematic diagram of (a) single photon, (b) multi-photon and (c) thermally driven reaction
![(a) Laser direct writing preparation of silver metal micro-nano structure electrode[26]; (b) Laser direct writing preparation of waterproof force-sensitive sensor [27]](/Images/icon/loading.gif){kind=icon}
Fig. 3. (a) Laser direct writing preparation of silver metal micro-nano structure electrode[26]; (b) Laser direct writing preparation of waterproof force-sensitive sensor [27]
Fig. 4. The schematic diagram of the laser direct writing experimental device. Star and zigzag copper electrodes on PET substrate. Photo of the touch switch control device for turning on and off the LED[28]
Fig. 5. A schematic diagram and photograph of manufacturing reduced graphene oxide and gold current collector structure on a paper substrate for use in miniature supercapacitors[33]
Fig. 6. Femtosecond laser processing ultra-sensitive SERS chip[46]
Fig. 7. Graphene structure prepared by laser direct writing and carbonization of bread surface[58]
Fig. 8. Laser direct writing on the surface of the polymer produced an image of a six-unit carbon sensor array[61]
Fig. 9. The morphology and electrical performance test results of laser direct writing carbonized MoS2 doped film supercapacitor[65]
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