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    Journals >Acta Optica Sinica >Volume 6 >Issue 3 >Page 274 > Article
    • Acta Optica Sinica
    • Vol. 6, Issue 3, 274 (1986)
    Preliminary research of contact photolithography by using a UV excimer laser
    LOU QIHONG, LU DENWU, QI JIANPING, and WANG REMWEM
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    LOU QIHONG, LU DENWU, QI JIANPING, WANG REMWEM. Preliminary research of contact photolithography by using a UV excimer laser[J]. Acta Optica Sinica, 1986, 6(3): 274 Copy Citation Text show less
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    LOU QIHONG, LU DENWU, QI JIANPING, WANG REMWEM. Preliminary research of contact photolithography by using a UV excimer laser[J]. Acta Optica Sinica, 1986, 6(3): 274
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