• Opto-Electronic Engineering
  • Vol. 47, Issue 8, 190068 (2020)
Xiao Shilei* and Li Bincheng
Author Affiliations
  • [in Chinese]
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    DOI: 10.12086/oee.2020.190068 Cite this Article
    Xiao Shilei, Li Bincheng. Residual stress measurement methods of optics[J]. Opto-Electronic Engineering, 2020, 47(8): 190068 Copy Citation Text show less

    Abstract

    Residual stress is an important performance indicator of optics, which is of great significance to the fa-brications and applications of optical components. Residual stress measurement methods of optics can be summed up into two categories: methods based on the strain measurement and on the stress induced birefringence mea-surement, respectively. The strain based methods, which are built upon crystal dynamics and elastic mechanics, in-cluding X-ray diffraction (XRD), Stoney curvature method, and micro-Raman spectroscopic method, are well devel-oped and widely used. Methods based on the measurements of birefringence phase retardation induced by residual stress, including digital photoelasticity method, photoelasticitic modulator (PEM) method and polarization-dependent cavity ring-down method, show a higher precision. The principles, measurement precisions and application scena-rios of these residual stress measurement methods are summarized in this overview. Comparisons between the performances of these methods are performed and correlations between them are analyzed in detail.
    Xiao Shilei, Li Bincheng. Residual stress measurement methods of optics[J]. Opto-Electronic Engineering, 2020, 47(8): 190068
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