• Acta Optica Sinica
  • Vol. 42, Issue 9, 0912001 (2022)
Wenwen Lu1、2, Jingyang Guo1、2, and Shanyong Chen1、2、*
Author Affiliations
  • 1Laboratory of Science and Technology on Integrated Logistics Support, College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, Hunan, China
  • 2Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, Hunan, China
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    DOI: 10.3788/AOS202242.0912001 Cite this Article Set citation alerts
    Wenwen Lu, Jingyang Guo, Shanyong Chen. White Light Interferometry Stitching Measurement of Gull-Wing Aspheric Optics[J]. Acta Optica Sinica, 2022, 42(9): 0912001 Copy Citation Text show less
    Gull-wing aspheric optics. (a) Sample piece; (b) gull-wing surface divided into central convex and outer concave at inflection point
    Fig. 1. Gull-wing aspheric optics. (a) Sample piece; (b) gull-wing surface divided into central convex and outer concave at inflection point
    Subaperture division based on transformation between global coordinate system and local coordinate system
    Fig. 2. Subaperture division based on transformation between global coordinate system and local coordinate system
    Subaperture division for gull-wing surface
    Fig. 3. Subaperture division for gull-wing surface
    Scanning measurement path planning. (a) Central ring subaperture; (b) first ring off-axis position subaperture; (c) overlapping region of central ring subaperture and first ring off-axis position subaperture; (d) measurement path planning of central ring and first ring; (e) measurement path planning of full aperture
    Fig. 4. Scanning measurement path planning. (a) Central ring subaperture; (b) first ring off-axis position subaperture; (c) overlapping region of central ring subaperture and first ring off-axis position subaperture; (d) measurement path planning of central ring and first ring; (e) measurement path planning of full aperture
    Three-dimensional model diagram of scanning measurement platform
    Fig. 5. Three-dimensional model diagram of scanning measurement platform
    Flow chart of scanning stitching measurement
    Fig. 6. Flow chart of scanning stitching measurement
    Calculation diagram of overlapping point pair matching
    Fig. 7. Calculation diagram of overlapping point pair matching
    Gull-wing aspheric surface measurement site
    Fig. 8. Gull-wing aspheric surface measurement site
    Partial subaperture measurement results. (a1)(a2) Central subaperture; (b1)(b2) first ring off-axis position subaperture; (c1)(c2) second ring off-axis position subaperture; (d1)(d2) third ring off-axis position subaperture
    Fig. 9. Partial subaperture measurement results. (a1)(a2) Central subaperture; (b1)(b2) first ring off-axis position subaperture; (c1)(c2) second ring off-axis position subaperture; (d1)(d2) third ring off-axis position subaperture
    Full aperture profile error result
    Fig. 10. Full aperture profile error result
    Comparison of line profile measurement results. (a) profile result of full-aperture profile error line; (b) measurement result obtained by profiler
    Fig. 11. Comparison of line profile measurement results. (a) profile result of full-aperture profile error line; (b) measurement result obtained by profiler
    CGH compensator test comparison experiment. (a) CGH compensator test site; (b) CGH profile test result; (c) profile test comparison in same area
    Fig. 12. CGH compensator test comparison experiment. (a) CGH compensator test site; (b) CGH profile test result; (c) profile test comparison in same area
    ParameterR /mmKα1α2α3α4
    Value16.0200-3.7045134×10-4-9.7543842×10-7-8.70055945×10-8
    Table 1. Parameters of surface shape
    Parameter2.75×5.50×10.00×20.00×50.00×
    TypeMichelsonMichelsonMirauMirauMirau
    NA0.080.150.300.400.55
    FOV /(mm2)3.001.500.830.420.17
    Slope limit /(°)3.717.2714.5321.8028.13
    R/D7.733.951.991.351.06
    Table 2. Specifications of standard objective lens with 1024 pixel×1024 pixel detector array
    ParameterCentralringFirstringSecondringThirdring
    β /(°)04.58.08.0
    γ /(°)0362012
    x0 /mm01.31022.70994.1450
    z0 /mm0-0.0526-0.2103-0.4236
    Table 3. Design parameters of subaperture for gull-wing surface
    Wenwen Lu, Jingyang Guo, Shanyong Chen. White Light Interferometry Stitching Measurement of Gull-Wing Aspheric Optics[J]. Acta Optica Sinica, 2022, 42(9): 0912001
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