Author Affiliations
1Laboratory of Science and Technology on Integrated Logistics Support, College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, Hunan, China2Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, Hunan, Chinashow less
Fig. 1. Gull-wing aspheric optics. (a) Sample piece; (b) gull-wing surface divided into central convex and outer concave at inflection point
Fig. 2. Subaperture division based on transformation between global coordinate system and local coordinate system
Fig. 3. Subaperture division for gull-wing surface
Fig. 4. Scanning measurement path planning. (a) Central ring subaperture; (b) first ring off-axis position subaperture; (c) overlapping region of central ring subaperture and first ring off-axis position subaperture; (d) measurement path planning of central ring and first ring; (e) measurement path planning of full aperture
Fig. 5. Three-dimensional model diagram of scanning measurement platform
Fig. 6. Flow chart of scanning stitching measurement
Fig. 7. Calculation diagram of overlapping point pair matching
Fig. 8. Gull-wing aspheric surface measurement site
Fig. 9. Partial subaperture measurement results. (a1)(a2) Central subaperture; (b1)(b2) first ring off-axis position subaperture; (c1)(c2) second ring off-axis position subaperture; (d1)(d2) third ring off-axis position subaperture
Fig. 10. Full aperture profile error result
Fig. 11. Comparison of line profile measurement results. (a) profile result of full-aperture profile error line; (b) measurement result obtained by profiler
Fig. 12. CGH compensator test comparison experiment. (a) CGH compensator test site; (b) CGH profile test result; (c) profile test comparison in same area
Parameter | R /mm | K | α1 | α2 | α3 | α4 |
---|
Value | 16.02 | 0 | 0 | -3.7045134×10-4 | -9.7543842×10-7 | -8.70055945×10-8 |
|
Table 1. Parameters of surface shape
Parameter | 2.75× | 5.50× | 10.00× | 20.00× | 50.00× |
---|
Type | Michelson | Michelson | Mirau | Mirau | Mirau | NA | 0.08 | 0.15 | 0.30 | 0.40 | 0.55 | FOV /(mm2) | 3.00 | 1.50 | 0.83 | 0.42 | 0.17 | Slope limit /(°) | 3.71 | 7.27 | 14.53 | 21.80 | 28.13 | R/D | 7.73 | 3.95 | 1.99 | 1.35 | 1.06 |
|
Table 2. Specifications of standard objective lens with 1024 pixel×1024 pixel detector array
Parameter | Centralring | Firstring | Secondring | Thirdring |
---|
β /(°) | 0 | 4.5 | 8.0 | 8.0 | γ /(°) | 0 | 36 | 20 | 12 | x0 /mm | 0 | 1.3102 | 2.7099 | 4.1450 | z0 /mm | 0 | -0.0526 | -0.2103 | -0.4236 |
|
Table 3. Design parameters of subaperture for gull-wing surface