[1] Wu B, Kumar A. Extreme ultraviolet lithography and three dimensional integrated circuit-a review [J]. Applied Physics Reviews-Focused Review, 2014(1): 011104.
[2] Brandt D C, Fomenkov I V, Farrar N R, et al. CO2/Sn LPP EUV Sources for device development and HVM [C]//Conference on Extreme Ultraviolet(EUV) Lithography IV, 2013: 8679: 86791G.
[3] Ohta T, Nowak K M, Suganuma T, et al. Development of the reliable high power pulsed carbon dioxide laser system for LPP EUV light source[C]//Conference on Extreme Ultraviolet (EUV) Lithography III, 2012: 8322: 83222O.
[5] Xu Y G. Theoretical study on phase-locking of a radial array CO2 laser[J]. Optics Communications, 2014(331): 244-250.
[7] Zheng Yijun, Tan Rongqing, Wang Donglei, et al. Novel high repetition-rate pulse CO2 laser[J]. Infrared and Laser Engineering, 2013, 42(10): 2697-2701. (in Chinese)
[8] Zhang Y C, Tian Z S, Sun Z H, et al. High pulse repetition frequency RF excited waveguide CO2 laser with mechanical Q-switching[J]. Infrared Physics & Technology, 2013, 58: 12-14.
[9] Zhang Y C, Tian Z S, Sun Z H, et al. Study of frequency stabilization for electro-optical Q-switched radio-frequency-excited waveguide CO2 laser using build-up time method [J]. Applied Optics, 2013, 52(16): 3732-3736.
[10] Xie J J, Guo R H, Li D J, et al. Theoretical calculation and experimental study of acousto-optically Q-switched CO2 laser [J]. Optics Express, 2010, 18(12): 12371-12380.
[11] Ge Ruirong, Dong Xiangqun, Lin Peihui, et al. Analysis on argon arc welding process and properties of dissimilar metal stainless steel-invar[J]. Hot Working Technology, 2014, 43(13): 201-202. (in Chinese)
[12] Wang Gang, Wang Shiyu, Cai Defang, et al. Study on the effect of diffraction efficiency on pulse compression of A-O Q-switched laser [J]. Acta Photonica Sinica, 2006, 35(1): 13-15. (in Chinese)
