• Infrared and Laser Engineering
  • Vol. 46, Issue 12, 1222002 (2017)
Li Wenjie1、2、*, Zhao Duliang1、2, Lin Ying1, Liang Xu1, and Fang Xiaodong1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/irla201746.1222002 Cite this Article
    Li Wenjie, Zhao Duliang, Lin Ying, Liang Xu, Fang Xiaodong. Design of highly sensitive on-line detecting system for ultraviolet pulse lasers energy[J]. Infrared and Laser Engineering, 2017, 46(12): 1222002 Copy Citation Text show less
    References

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    [2] Liu Shiyuan, Wu Xiaojian. Real-time exposure dose control algorithm for DUV excimer lasers[J]. Acta Optica Sinica, 2006, 26(6): 878-884.

    [3] Wakabayashi O, Enami T, Ishii K, et al. High-repetition-rate ArF excimer laser for microlithography[C]//SPIE, 2000, 4088: DOI10.1117/12. 405749.

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    [8] Liang Xu, You Libing, Wang Tao, et al. Excimer pulse energy stabilization realized by charging voltage realtime adjusting[J]. Chinese J Lasers, 2010, 37(2): 374-378.

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    [12] Zhang Haibo, Lou Qihong, Zhou Jun, et al. ArF excimer laser line narrowing technique[J]. Laser & Optoelectronics Progress, 2009, 46 (12): 46-51. (in Chinese)

    [13] Wang Qi, Wang Xiaoman, Zhao Haili, et al. Research on weak laser energy detection system[J]. Journal of Changchun University of Science and Technology (Natural Science Edition), 2016, 39(2): 62-66. (in Chinese)

    [14] Feng Gang, Feng Guobin, Shao Bibo, et al. Energy measurement of high-repetition-rate pulsed laser[J]. Chinese Optics, 2013, 6(2): 196-200. (in Chinese)

    [16] Xiong Yan, Lu Yaodong, Zhu Min, et al. Design of peak holding circruit for narrow laser pulse[J]. Laser & Infrared, 2012, 42(12): 1377-1380. (in Chinese)

    Li Wenjie, Zhao Duliang, Lin Ying, Liang Xu, Fang Xiaodong. Design of highly sensitive on-line detecting system for ultraviolet pulse lasers energy[J]. Infrared and Laser Engineering, 2017, 46(12): 1222002
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